Benzocyclobutene‐functionalized polysiloxane microspheres with high sphericity and narrow size distribution on the nanometer (BPNS) and micrometer (BPMS) scale were prepared by the hydrolysis‐condensation reaction of benzocyclobutene vinyl trimethoxysiloxane (BCBVST) in the absence of surfactants, respectively. In this paper, we systematically investigate the relationship between hydrolysis conditions and BPNS/BPMS size. The results show that the method developed in this paper is characterized by simple manipulation, controllable microsphere size, and high repeatability. A possible mechanism for the formation of BPMS has been proposed.