Preparation of a Micro Rubidium vapor cell and its integration in a chip-scale atomic magnetometer

Ji, Yu; Shang, Jintang; Chen, You‐Peng; Wong, Ching‐Ping

doi:10.1109/ectc.2014.6897490

Cited by 5 publications

(2 citation statements)

References 11 publications

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“…In 2014, Ji et al of Southeast University prepared a wafer-level spherical rubidium vapor cell by utilizing a combination of high-temperature thermoforming and a releasing agent [63], which first etched a hole array on a silicon wafer by utilizing dry etching and was then filled with an initiator for the first anodic bonding to produce a spherical vapor cell; then, a cavity array was etched by utilizing dry etching again, and it was finally filled with alkali metal atoms and buffer gas under vacuum and the second anodic bonding was performed to achieve a sealed vapor cell. The size of the alkali vapor cell reached 3 × 3 × 2 mm 3 .…”

Section: Direct Filling Methods Of Alkali Metal Elements In the Physi...mentioning

confidence: 99%

Recent Progress on Micro-Fabricated Alkali Metal Vapor Cells

Wang

et al. 2022

Biosensors

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Alkali vapor cells are the core components of atomic sensing instruments such as atomic gyroscopes, atomic magnetometers, atomic clocks, etc. Emerging integrated atomic sensing devices require high-performance miniaturized alkali vapor cells, especially micro-fabricated vapor cells. In this review, bonding methods for vapor cells of this kind are summarized in detail, including anodic bonding, sacrificial micro-channel bonding, and metal thermocompression bonding. Compared with traditional through-lighting schemes, researchers have developed novel methods for micro-fabricated vapor cells under both single- and double-beam schemes. In addition, emerging packaging methods for alkali metals in micro-fabricated vapor cells can be categorized as physical or chemical approaches. Physical methods include liquid transfer and wax pack filling. Chemical methods include the reaction of barium azide with rubidium chloride, ultraviolet light decomposition (of rubidium azide), and the high-temperature electrolysis of rubidium-rich glass. Finally, the application trend of micro-fabricated alkali vapor cells in the field of micro-scale gyroscopes, micro-scale atomic clocks, and especially micro-scale biomagnetometers is reviewed. Currently, the sensing industry has become a major driving force for the miniaturization of atomic sensing devices, and in the near future, the micro-fabricated alkali vapor cell technology of atomic sensing devices may experience extensive developments.

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Section: Direct Filling Methods Of Alkali Metal Elements In the Physi...mentioning

confidence: 99%

Recent Progress on Micro-Fabricated Alkali Metal Vapor Cells

Wang

et al. 2022

Biosensors

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“…In this paper, based on the previous research [21], [22], a novel wafer-level all-glass hermetic or vacuum packaging methodology was proposed for alkali vapor cells of atomic devices to enhance the environmental stability of the microalkali vapor cells. The upper half part of the package was wafer-level hemispherical glass bubble arrays prepared by a controllable process combining a hot forming process and a chemical foaming process (CFP) [20], [25].…”

Section: Introductionmentioning

confidence: 99%

Wafer-Level Hermetic All-Glass Packaging for Microalkali Vapor Cells of Chip-Scale Atomic Devices

Gan

et al. 2015

IEEE Trans. Compon., Packag. Manufact. Technol.

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To maintain a controllable environment for microalkali vapor cells of high-performance chip-scale atomic devices, a novel wafer-level hermetic all-glass packaging technology for microalkali vapor cells of atomic devices was investigated. A glass wafer with metal vias was used as the substrate to host the miroalkali vapor cells. Wafer-level hemispherical glass bubbles prepared by a chemical foaming process were used as transparent packaging caps. The performance of the rubidium vapor cell in the all-glass hermetic package was characterized by a laser frequency locking system and an ultraviolet spectrophotometer. The results show that hermetic all-glass packaging at a wafer level was demonstrated successfully. The results also indicate that after the hermetic all-glass packaging, the temperature variation of the microalkali vapor cells was controllably below 0.2°C at different working temperatures of atomic devices. A chip-scale atomic magnetometer using the hermetic all-glass micro vapor cell was demonstrated eventually. IndexTerms-Atomic devices, chemical foaming process (CFP), hot forming process, microrubidium vapor cell, optically pumped atomic magnetometer, ultraviolet spectrophotometer, wafer-level hermetic package.

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System integration of a SERF atomic magnetometer on a glass wafer substrate

Shang

Gan

et al. 2015

2015 16th International Conference on Electronic Packaging Technology (ICEPT)

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Preparation of a Micro Rubidium vapor cell and its integration in a chip-scale atomic magnetometer

Cited by 5 publications

References 11 publications

Recent Progress on Micro-Fabricated Alkali Metal Vapor Cells

Recent Progress on Micro-Fabricated Alkali Metal Vapor Cells

Wafer-Level Hermetic All-Glass Packaging for Microalkali Vapor Cells of Chip-Scale Atomic Devices

System integration of a SERF atomic magnetometer on a glass wafer substrate

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