Au nanoparticles arrays for silicon solar cells were fabricated by self-assembly method to accommodate manufacturing process of traditional silicon solar cells. Surface morphologies of 10-30 nm thick films after annealing treatment at 600 °C and 700 °C were analyzed. It indicated that morphological features of Au nanoparticles arrays such as particle shapes, size distribution vary with thicknesses of Au films, annealing temperatures and surface morphologies of substrates.