Preparation of carbon fibers/carbon/alumina tubular composite membranes and their applications in treating Cu-CMP wastewater by a novel electrochemical process

Yang, Gordon C.C.; Tsai, Chi-Ming

doi:10.1016/j.memsci.2008.04.060

Cited by 21 publications

(28 citation statements)

References 33 publications

(61 reference statements)

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“…of this study [3], composite membranes with activated carbon layers and carbon fibers (or whiskers) on ceramic substrates had been reported by Sakoda group [4][5][6][7][8]. They reported that the particles and/or biomaterials in the influent could be trapped by the carbon fibers layer of carbon whisker membranes yielding an increased permeate flux and improved cleaning processes for filtration and backflushing.…”

Section: Introductionmentioning

confidence: 71%

“…Many treatment methods for Cu-CMP wastewater have been developed and/or tested [13][14][15][16][17][18][19][20][21][22][23][24][25][26]. Details can be found in Part 1 of this study [3]. Among various technologies mentioned above, coagulation, electrocoagulation, filtration, and electrofiltration were found to be effective in removing the suspended solids and/or copper from Cu-CMP wastewater.…”

Section: Introductionmentioning

confidence: 99%

“…Among various technologies mentioned above, coagulation, electrocoagulation, filtration, and electrofiltration were found to be effective in removing the suspended solids and/or copper from Cu-CMP wastewater. As indicated in Part 1 of this study [3], a novel simultaneous electrocoagulation/electrofiltration (EC/EF) method had already been developed by the principal investigator of the present study [27]. Based on the principle of this patented method, several studies had been carried out for treating various types of CMP wastewater and other nanoparticle-containing wastewaters [3,[28][29][30].…”

Section: Introductionmentioning

confidence: 99%

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Preparation of carbon fibers/carbon/alumina tubular composite membranes and their applications in treating Cu-CMP wastewater by a novel electrochemical process: Part 2

Yang

Tsai

2009

Journal of Membrane Science

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a b s t r a c tThis work (designated Part 2 of this study) aims to further discuss the present authors' research findings relevant to that of reported earlier (designated Part 1 of this study). In Parts 1 and 2 of this study, carbon fibers/carbon/alumina tubular composite membranes (CCA-TCMs) were first prepared through substrate formation, polyvinylidene chloride (PVDC) film wrapping, PVDC carbonization, catalyst precursor coating, and the chemical vapor deposition (CVD) process. The finished CCA-TCMs, with a pore size distribution ranging from 2 to 20 nm and a nominal pore size of ca. 3.5 nm, were further characterized by environmental scanning electron microscopy (ESEM), high-resolution transmission electron microscopy (HR-TEM), and permporometry. The so prepared CCA-TCMs were incorporated into a crossflow simultaneous electrocoagulation and electrocoagulation (EC/EF) treatment module to evaluate their capabilities in treating Cu-CMP (chemical mechanical polishing of the copper layer) wastewater obtained from a wafer fab. Crossflow EC/EF performance tests were carried out based on the Taguchi experimental design using the electric field strength, crossflow velocity, transmembrane pressure, and filtration area as the experimental factors. Under the optimal operating conditions, the EC/EF treatment module coupled with CCA-TCMs are capable of treating Cu-CMP wastewater to yield permeate with a turbidity of below 0.3 NTU. In the meantime, the removal efficiencies ranging from 82 to 91% for total solids (TS), total organic carbon (TOC), Cu, and Si could be obtained. By comparing the results of Part 1 and Part 2 of this study, the optimal operating conditions determined from the experimental designs based on the fractional factorial and Taguchi method yielded similar good qualities of permeate. A further evaluation of the technical significance of this study shows promising fundamental and practical results.

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Section: Introductionmentioning

confidence: 71%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Preparation of carbon fibers/carbon/alumina tubular composite membranes and their applications in treating Cu-CMP wastewater by a novel electrochemical process: Part 2

Yang

Tsai

2009

Journal of Membrane Science

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“…Additional electrochemical processes are being developed (Yang and Tsai, 2008), but have yet to be fully adopted by the semiconductor industry. Biosorption techniques could offer a unique alternative to ion exchange and electrochemical methods, since biosorbents are renewable resources (e.g.…”

Section: Introductionmentioning

confidence: 99%

“…This novel approach to heavy metal decontamination utilizes the natural ability of certain bacteria and fungi to adsorb (and even scavenge) metals and metal ions . Furthermore, production of bacterial and fungal biomass is an environmentally friendly process which has been pioneered by the biotechnology industry to produce enormous quantities at low cost Maketon and Ogden, 2009;Pagnanelli et al, 2000;Qureshi et al, 2001;Stanley and Ogden, 2003;Teitzel and Parsek, 2003;Vel azquez et al, 2001;Wang et al, 2011;Yang and Tsai, 2008).…”

Section: Introductionmentioning

confidence: 99%