“…The generation of nanosized particles during the PECVD could be explained in two possible ways. One suggests the formation of semispherical Ni islands on the Ni facets to minimize their high surface energy. , Another possibility is the sputtering and redeposition of Ni nanoparticles by plasma species resulting from the decomposition of NH 3 and C 2 H 2 , similar to what was reported in refs , . In our DC-PECVD reactor environment, the substrate serves as a cathode, and positively charged ion bombardment may occur, which could lead to Ni catalyst sputtering.…”