2020
DOI: 10.3390/ma13194325
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Preparation of Copper Nitride Films with Superior Photocatalytic Activity through Magnetron Sputtering

Abstract: TiO2 possesses a wide forbidden band of about 3.2 eV, which severely limits its visible light absorption efficiency. In this work, copper nitride (Cu3N) films were prepared by magnetron sputtering at different gas flow ratios. The structure of the films was tested by scanning electron microscope, X-ray diffractometer, and X-ray photoelectron spectroscope. Optical properties were investigated by UV-vis spectrophotometer and fluorescence spectrometer. Results show that the Cu3N crystal possesses a typical anti-R… Show more

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Cited by 10 publications
(5 citation statements)
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“…+ Ar]), substrate temperature and deposition pressure, which have a significant influence on Cu 3 N thin film growth and their properties. Additionally, deposition parameters also affect the crystal orientation and grain size of Cu 3 N thin films [65,83].…”
Section: Thin Film Deposition Techniquesmentioning
confidence: 99%
See 3 more Smart Citations
“…+ Ar]), substrate temperature and deposition pressure, which have a significant influence on Cu 3 N thin film growth and their properties. Additionally, deposition parameters also affect the crystal orientation and grain size of Cu 3 N thin films [65,83].…”
Section: Thin Film Deposition Techniquesmentioning
confidence: 99%
“…The deposition parameters of Cu3N thin films include sputtering power, N2 pressure r (r = N2/[N2 + Ar]), substrate temperature and deposition pressure, which have a significant influence on Cu3N thin film growth and their properties. Additionally, deposition parameters also affect the crystal orientation and grain size of Cu3N thin films [65,83]. Cu3N thin films can also be deposited by thermal evaporation using nitrogen as a gas source.…”
Section: Thin Film Deposition Techniquesmentioning
confidence: 99%
See 2 more Smart Citations
“…23 Jiang et al fabricated Cu 3 N thin films by magnetron sputtering at different gas flow ratios and acquired superior photocatalytic activity. 24 Nevertheless, there are few studies concerning the application of magnetron sputtered Cu 3 N in SCs, and the lack of comprehensive investigation still prevents a deeper understanding of its energy storage behavior.…”
Section: Introductionmentioning
confidence: 99%