Chinese Phys. Lett.
 1999
DOI: 10.1088/0256-307x/16/5/020
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Preparation of GaN Thin Films by Reactive Ionized Cluster Beam Technique

Chun Zhang1,
Qiong Wang2,
Zhang Guan-ming3
et al.

Abstract: Preparation of GaN Thin Films by Reactive Ionized Cluster Beam Technique *MENG Xian-quan(sE&), ZHAO Chun(B%), WANG Qiong(E%), ZHANG Guan-ming(%% sa), LUO Hai-lin(p$#), YE Ming-sheng(wg%), GUO Hu~-xi(BP'C;r\@), FAN Xiang-.b(%&%)

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