Preparation of hard coatings by ion beam methods

Weißmantel, C.; Reiße, G.; Erler, H.-J.; Henny, F.; Bewilogua, K.; Ebersbach, U.; Schürer, Christian

doi:10.1016/0040-6090(79)90035-x

Cited by 118 publications

(11 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Furthermore, the amorphous substrate cannot be expected to .play any role in constraining the propagation direction. The parallel sinusoidal buckling on a glass substrate observed by both Weissmantel and co-workers [7,8] and Nir [9] cannot be observed in the present work. As for the parallel buckling waves, the presence .of anisotropic internal stress might be the reason, as Nir points out [9].…”

Section: Resultscontrasting

confidence: 54%

See 1 more Smart Citation

Stress relief behaviour of diamond-like carbon films on glasses

Lee

Baik

Eun

1993

Diamond and Related Materials

View full text Add to dashboard Cite

The stress relief behaviour of diamond-like carbon (DLC) films on glass substrates was investigated. The r.f.-plasma-enhanced chemical vapour deposition method was used for the deposition with variable negative bias voltages of the cathode from -100 to -700 V. Beyond a critical thickness of the film, film delamination starts to occur after its removal from the reaction chamber. In addition to the previously observed stress relief morphologies, sinusoidal cracking and sinusoidal removal of the film are also observed. The stress relief morphology is dependent on the film thickness and the negative bias voltage. The measured wavelength of sinusoidal buckling increases with both increasing film thickness and increasing negative bias voltage. This behaviour is qualitatively consistent with a phenomenological equation derived by Nir. It was suggested that the elastic modulus of the DLC film can be calculated using the dependence of the wavelength of sinusoidal buckling on the film thickness and the negative bias voltage.

show abstract

Section: Resultscontrasting

confidence: 54%

“…In 1979 Weissmantel and co-workers [7,8] first reported sinusoidal stress relief patterns of DLC films on glass and NaC1 substrates. Their study was, however, limited to the observation itself.…”

Section: Introductionmentioning

confidence: 99%

Stress relief behaviour of diamond-like carbon films on glasses

Lee

Baik

Eun

1993

Diamond and Related Materials

View full text Add to dashboard Cite

show abstract

“…Foremost in enhanced capability is the versatility afforded in the choice of two independently controlled thermal evaporation sources and the added method of IBAD, a state-of-the-art technology available to the thin film community [3,4] but yet to be incorporated into target preparation. These are shown in the photograph of Fig.…”

Section: Enhanced Capabilitiesmentioning

confidence: 99%

A new evaporator system for target preparation at Argonne National Laboratory

Greene¹,

Neubauer²,

Deligiannis³

2006

Nuclear Instruments and Methods in Physics Research Section A:

View full text Add to dashboard Cite

“…A variety of plasma andion beam techniques have been employed to generate the carbon films. The films can be made by rf plasma decom osition of a hydrocarbon gas, 6 , 7 or other alkanes, by low energy carbon ion beam deposition, 9 or by ion plating and dual beam techniques.1 0 Weisanantel, et al 10 refer to these films as i-carbon (i-C) implying that some type of ion bombardment or ion.beam is involved in the film preparation. At NASA LewisResearch Center films have been produced by direct carbon ion beam deposition using methane (CH 4 ) in either single or dual ion beam sources.…”

Section: Diamond-like Carbon Filmsmentioning

confidence: 99%

Ion beam deposited protective films

Mirtich

1981

15th International Electric Propulsion

View full text Add to dashboard Cite

Single or dual ion beam sources were used to deposit thin films'for three different applications. Metal and metal oxide films were evaluated as protective coatings for die materials. Film adher ence was measured and the most promising films were then tested under environments similar to operating conditions. It was shown that some materials do protect die material (H-13 steel) and do reduce thermal fatigue. Diamondlike films have many useful applications. A series of exper iments were conducted to define and optimize new approaches t o the manufacture of such films.A dual bdam system using argon and methane gases was developed to generate these films. The results of initial measurements which determine the quality of the films are reported. The fiber* glass beam shield incorporated in the 8-cm diameter mercury ion thruster to be used aboard a space flight experiment was coated with molybdenum to insure proper electrical and thermal properties. During the evolution of these programs, deposition parameters and fixturing tech niques were developed and are also presented. Single or dual ion beam sources were used to deposit thin films for three different applica tions. Metal and metal oxide films were evaluated as protective coatings for die materials. Film ,adherence was measured and the most promising films were then tested under environments similar to operating conditions. It was shown that some materials do protect die material (H-13 steel) and do reduce thermal fatigue. Diamondlike films have many useful applications. A series of experiments were conducted to define and optimize new -pproaches to the manufacture of such films. A dual beam system using argon and methane gases was developed to generate these films. The results of initial measurements which determine the quality of the films are reported. The fiber glass beam shield incorporated in the 8-cm diameter mercury ion thruster to be used aboard a space flight experiment was coated with molybdenum to insure proper electrical and thermal properties. During the evolution of these programs, deposition parameters and fixturing techniques were developed and are also presented,

show abstract

Preparation of hard coatings by ion beam methods

Cited by 118 publications

References 16 publications

Stress relief behaviour of diamond-like carbon films on glasses

Stress relief behaviour of diamond-like carbon films on glasses

A new evaporator system for target preparation at Argonne National Laboratory

Ion beam deposited protective films

Contact Info

Product

Resources

About