Preparation of high-quality β-SiC coating via chemical vapor deposition using the SiCl4–CH4–H2–N2 system

Huo, Tongguo; Zhu, Dan; Zheng, Jianxin; Lin, Yuan; Dai, Yu; Wu, Jian

doi:10.1016/j.surfcoat.2024.131687

Surface and Coatings Technology

2025

DOI: 10.1016/j.surfcoat.2024.131687

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Preparation of high-quality β-SiC coating via chemical vapor deposition using the SiCl4–CH4–H2–N2 system

Tongguo Huo,

Dan Zhu,

Jianxin Zheng

et al.

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Preparation of high-quality β-SiC coating via chemical vapor deposition using the SiCl4–CH4–H2–N2 system

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References 42 publications

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