2017
DOI: 10.1007/s12633-016-9535-4
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Preparation of Nanostructured SixN1−x Thin Films by DC Reactive Magnetron Sputtering for Tribology Applications

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Cited by 5 publications
(4 citation statements)
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“…Deposition time was 4 hours for all samples. More details on the optimum preparation conditions can be found elsewhere [35][36][37][38][39][40][41].…”
Section: Experimental Workmentioning
confidence: 99%
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“…Deposition time was 4 hours for all samples. More details on the optimum preparation conditions can be found elsewhere [35][36][37][38][39][40][41].…”
Section: Experimental Workmentioning
confidence: 99%
“…Over many decades, Si 3 N 4 powders and thin films with different phases have been prepared using different methods and techniques, including chemical and physical, such as ion-assisted deposition [16,17], heating powdered silicon [18,19], carbothermal reduction [20][21][22], chemical vapor deposition (CVD) [23][24][25][26][27], plasma-enhanced CVD [28], nitrogen glow discharge [29,30], atomic layer deposition (ALD) [31][32][33], silaneammonia reaction [34], and reactive sputtering [35][36][37][38][39][40][41][42][43]. However, the effect of the electrical conductivity of silicon used as a precursor of silicon nitride was not determined.…”
Section: Introductionmentioning
confidence: 99%
“…1). For example, the combination of materials science and tribology can use preparation methods [15] and performance parameters of different materials [16] to design an interface and achieve good tribological properties. The combination of physics and tribology can guide the design of an interface texture [17,18] and explain the mechanism of friction reduction of 2D materials [19].…”
Section: Literature Review 21 Development Of Tribologymentioning
confidence: 99%
“…If the light waves have a long path inside the medium longer than the straight path of the waves, it will leave the medium without scattering. This is known as "multiple scattering", and it is not restricted to light waves but it's applied to all waves in nature [4][5][6]. There is an important parameter in multiple scattering; that is the mean free path (l) which is defined as the average distance for a light wave transferred between two scattering events [6] and given by [7,8] …”
Section: Introductionmentioning
confidence: 99%