2019
DOI: 10.1088/1361-6528/ab1d3c
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Preparation of non-oxidized Ge quantum dot lattices in amorphous Al2O3, Si3N4 and SiC matrices

Abstract: The preparation of non-oxidized Ge quantum dot (QD) lattices embedded in Al 2 O 3 , Si 3 N 4 , SiC matrices by self-assembled growth was studied. The materials were produced by magnetron sputtering deposition, using different substrate temperatures. The deposition regimes leading to the self-assembled growth type and the formation of three-dimensionally ordered Ge QD lattices in different matrices were investigated and determined. The oxidation of the Ge QDs in different matrices was monitored and the best con… Show more

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Cited by 15 publications
(32 citation statements)
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“…The ordering type of QDs for this case is body-centered tetragonal (BCT), which can be concluded from the arrangement and shape of spots and also from the literature data about similar samples [10][11][12].…”
Section: D Ge Quantum Dot Latticesmentioning
confidence: 58%
See 1 more Smart Citation
“…The ordering type of QDs for this case is body-centered tetragonal (BCT), which can be concluded from the arrangement and shape of spots and also from the literature data about similar samples [10][11][12].…”
Section: D Ge Quantum Dot Latticesmentioning
confidence: 58%
“…The method is especially efficient for the analysis of systems that have some regularity in the NO ordering. Due to the regularity, distinctive Bragg peaks appear in GISAXS maps, because GISAXS reflects the structural properties in the reciprocal space [1][2][3][4][5][6][7][8][9][10][11][12]. Thus, a visual inspection of a GISAXS map is usually enough to roughly determine the type of the NO arrangement and the separations between the NOs.…”
Section: Introductionmentioning
confidence: 99%
“…We have assumed that the QDs are arranged in the BCT lattice, with the parameters a and c described above, in accordance with the arrangement of pure Ge QDs or Ge-core Si-shell QDs in alumina, produced by the same method. 4,5,19,23,24 The QDs are assumed to have a core− shell structure, with the radius of the core R c and the total radius R s . The center of the core is shifted from the center of the shell by the vector d. Details about the definition of these parameters can be found in ref 24.…”
Section: Structural Propertiesmentioning
confidence: 99%
“…The dependence of these optical constants with the photon energy was modeled using a flexible multiple Gaussian oscillator model 46 that has been shown to provide a good description of the optical properties of this kind of composites. 5,23 The optimal value of the parameters describing the oscillator model and the total multilayer thickness was numerically determined by fitting the measured ellipsometric spectra using the V-VASE software. The results, as well as the simulations explained below, are shown in Figure 6.…”
Section: Structural Propertiesmentioning
confidence: 99%
“…An important part of the development and research of new functional materials is related to the methods of preparation and conditioning of nanostructures in matrices [21,22]. The creation of spatially ordered nanoparticle (NP) lattices in the matrix material is not a necessary consequence of the magnetron deposition.…”
Section: Introductionmentioning
confidence: 99%