Preparation of p-Type Heavily-Doped 4H-SiC by Laser Irradiation of Solid Al Film

Liting, 胡莉婷 Hu; Lingfei, 季凌飞 Ji; Yan, 吴燕 Wu; Zhenyuan, 林真源 Lin

doi:10.3788/cjl201845.0603003

中国激光

2018

DOI: 10.3788/cjl201845.0603003

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Preparation of p-Type Heavily-Doped 4H-SiC by Laser Irradiation of Solid Al Film

胡莉婷 Hu Liting¹,

季凌飞 Ji Lingfei²,

吴燕 Wu Yan³

et al.

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Preparation of p-Type Heavily-Doped 4H-SiC by Laser Irradiation of Solid Al Film

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