2006
DOI: 10.1007/s11431-006-0164-9
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Preparation of patterned SiC and SiCN microstructures

Abstract: Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as template, polycarbosilane (PCS) and polysilazane (PSZ) as preceramic polymers. The preparing process was followed by precursor infiltration, the curing of the precursor, demolding of the template and pyrolysis of the cured preceramic polymer pattern. It shows that the dimensions of the ceramic patterns can be tailored by using the PDMS molds with different dim… Show more

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(6 citation statements)
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“…[ 47 ] Relying on the liquid nature, PCS can also be molded into polydimethylsiloxane micromolds and crosslinked between 200 and 400 °C. [ 48 ] After pyrolysis at 900° and 1500 °C, freestanding PCS micropillars were obtained with nanocrystalline β‐SiC. Figure shows the scanning electron microscopy (SEM) images of the micropillars released from the polydimethylsiloxane molds.…”
Section: Carbide Materialsmentioning
confidence: 99%
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“…[ 47 ] Relying on the liquid nature, PCS can also be molded into polydimethylsiloxane micromolds and crosslinked between 200 and 400 °C. [ 48 ] After pyrolysis at 900° and 1500 °C, freestanding PCS micropillars were obtained with nanocrystalline β‐SiC. Figure shows the scanning electron microscopy (SEM) images of the micropillars released from the polydimethylsiloxane molds.…”
Section: Carbide Materialsmentioning
confidence: 99%
“…Figure shows the scanning electron microscopy (SEM) images of the micropillars released from the polydimethylsiloxane molds. [ 48 ] Figure a,b shows the PCS pillars pyrolyzed at 900 °C, while Figure 5c,d shows the pillars after crystallization at 1500 °C. [ 49 ] These pillars have uniform sizes and shapes even though the patterned arrangements have been disrupted.…”
Section: Carbide Materialsmentioning
confidence: 99%
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