Preparation of phosphorus oxynitride glasses

Reidmeyer, Mary R.; Rajaram, Mohan; Day, Delbert E.

doi:10.1016/0022-3093(86)90090-6

Cited by 93 publications

(42 citation statements)

References 13 publications

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“…It can be expected that this interlayer affects the conduction mechanism, which will be investigated in the future in more detail. Reidmeyer et al [29] have proposed a mechanism for nitrogen incorporation in the metaphosphate glasses. In the process of LiPON growth at the interface, the nitrogen incorporates into phosphate in several ways.…”

Section: N1s Photoelectron Spectramentioning

confidence: 99%

Investigation of the solid-state electrolyte/cathode LiPON/LiCoO2 interface by photoelectron spectroscopy

Jacke

Song

Cherkashinin

et al. 2010

Ionics

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The electronic structure of a solid electrolyte/ solid electrode interface (SESEI) of an all-solid-state thin film battery was investigated. The thin film battery consisted of a LiPON solid electrolyte and a LiCoO 2 cathode. The lithium phosphorus oxynitride (LiPON) electrolyte was RF sputtered in a step-by-step procedure onto the cathode and investigated by photoelectron X-rayinduced spectroscopy after each deposition step. An intermediate layer was found-composed of some new species-that differs in its chemical composition from the cathode as well as the LiPON solid electrolyte material and changes with growing layer thickness. In contrast, the electronic structure of the underlying cathode material remained predominantly unchanged.

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Section: N1s Photoelectron Spectramentioning

confidence: 99%

Investigation of the solid-state electrolyte/cathode LiPON/LiCoO2 interface by photoelectron spectroscopy

Jacke

Song

Cherkashinin

et al. 2010

Ionics

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“…In the previous work, it has been shown that the incorporation of nitrogen into phosphate glasses could increase the hardness, devitrification temperature, and resistance to water and salt solutions (Marchand 1983;Reidmeyer et al 1986;Larson and Day 1986). LiPON thin films exhibit a very low electronic conductivity, a relatively high ionic conductivity of 3⋅3 × 10 -6 S/cm at room temperature, no phase change in wide temperature range, and a large stability electrochemical window voltage vs Li metal at room temperature (Bates et al 1993;Roh et al 2000).…”

Section: Introductionmentioning

confidence: 94%

Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Xie

2008

Bull Mater Sci

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Lithium phosphorus oxynitride (LiPON) thin films as solid electrolytes were prepared by radio frequency magnetron sputtering of a Li 3 PO 4 target in ambient nitrogen atmosphere. The influence of radio frequency (rf) power on the structure and the ionic conductivity of LiPON thin films has been investigated. The morphology, composition, structure and ionic conductivity of thin films were characterized by scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy and a.c. impedance measurement. It was found that ionic conductivity of LiPON thin films increases with N content in thin films. XPS measurements reveal that ionic conductivity also keeps relativity with the structure of thin films. Higher the N t /N d ratio, higher will be the ionic conductivity of LiPON thin films. And both of them can be improved by increasing rf power from 1⋅5 W/cm 2 to 5⋅5 W/cm 2 .

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“…However, their poor chemical durabilities [7,8] limit their use in many applications. These glasses are very important materials because of their structural versatility to accept several cation and/or anion exchanges.…”

Section: Introductionmentioning

confidence: 99%

Raman and impedance spectroscopy methods of P 2 O 5 –Li 2 O–Al 2 O 3 glass system doped with MgO

Jlassi

Sdiri²,

Elhouichet

et al. 2015

Journal of Alloys and Compounds

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Preparation of phosphorus oxynitride glasses

Cited by 93 publications

References 13 publications

Investigation of the solid-state electrolyte/cathode LiPON/LiCoO2 interface by photoelectron spectroscopy

Investigation of the solid-state electrolyte/cathode LiPON/LiCoO2 interface by photoelectron spectroscopy

Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Raman and impedance spectroscopy methods of P 2 O 5 –Li 2 O–Al 2 O 3 glass system doped with MgO

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