Preparation of pulsed DC magnetron deposited Fe‐doped SnO₂ coatings

Abstract

Iron-doped SnO 2 coatings were deposited in a 50 kHz DCpulsed magnetron sputtering discharge. The pulses had a duration of 4 ms in selected gas mixtures from pure argon up to 60% of oxygen at a constant total pressure of 0.2 Pa. A single target of SnO 2 with Fe inset was used. The mass spectrometry study detected the gas-related ions Ar þ , O 2 þ and O þ , where the last one becomes the dominant positive ion at higher oxygen contents. Atomic oxygen ions had a higher energy as it resulted from the collision-caused dissociation on the target surface. The tin-related species were detected as Sn þ and SnO þ . SnO 2 þ species were not detected. The deposition rate decreased by using gas mixtures with oxygen as well as the corresponding amount of Sn-related species in the plasma. The increase of oxygen also increased significantly the sheet resistance of the films. The XPS study showed that the iron concentration decreased by using additional oxygen. But the O/Sn ratio in the coatings was constant, contrary to the increased FeO/Fe ratio in the films. An additional analysis of the coatings by spectroscopic ellipsometry has shown a dependence of the polarizability and the permittivity on the amount of oxygen used during the deposition. In contrast, the study has found no such dependence for the absorption of the layers.

SnO2 Films Deposited by Ultrasonic Spray Pyrolysis: Influence of Al Incorporation on the Properties

“…A wide variety of growth methods can typically be used for the deposition of undoped and differently doped tin oxide thin films, including magnetron sputtering [20,21,22,23], molecular beam epitaxy [24], pulsed-laser deposition (PLD) [25], chemical vapor deposition (CVD) [26], atomic layer deposition (ALD) [27], or spray pyrolysis [28,29,30]. Spray pyrolysis has the advantages of being cost efficient and surface scalable [31].…”

Thin SnOx films for surface plasmon resonance enhanced ellipsometric gas sensing (SPREE)

“…The layer morphology was also determined by means of atomic force microscopy (AFM) and transimission electron mircoscopy (TEM) measurements. These measurements are reported in [ 18 – 19 ]. It was found that the intended layer structure (glass-gold-SnO x ) was achieved and the surface roughness is low (root mean square average of height deviation R q < 0.2 nm).…”

Effect of duty cycle on properties of Ni-P-(sol) Al2O3 nanocomposite coatings prepared by pulse-assisted sol-gel method

“…With the development of electroplating technology and nanotechnology, the research on nanocomposite coatings has become the focus of domestic and foreign scholars. The introduction of second-phase particles enhances the performance of these coatings, such as nano-scale SiO 2 [21], SnO 2 [22], Al 2 O 3 [23][24][25][26], TiO 2 [27], SiC [28], PTFE [29], ZrO 2 [30], graphene [31,32], etc. The phase distribution in the nanostructured coating is more uniform than that in micron structure coating since the atoms in the matrix are more firmly bound to the nano reinforcement; the nano-enhancing phase has a more significant enhancement effect than the micron size in the metal system.…”

“…On the flip side, the powder tends to agglomerate during the plating process, and it isn't easy to uniformly grow on the substrate surface. To solve this bad agglomeration phenomenon, the sol-gel method can be used to enhance the coating properties [33], e. g., SnO 2 sol [22], TiO 2 sol [34], and SiO 2 sol [35].…”