Fe-Pd films have been deposited onto fused quartz substrates using a dual source dc magnetron sputtering apparatus, equipped with two independent targets of pure Fe and Pd. The Pd content of deposited films can be controlled with an accuracy of 1 at%Pd by varying the power for the Pd target at constant power for the Fe target. Fe-Pd films containing about 29 at%Pd show a fct structure after annealing at 900 C followed by quenching into iced water. These films underwent a thermoelastic fcc-to-fct martensitic transformation and the fct-phase region, where the fct phase is present at room temperature in the annealed films, has a tendency of shifting toward higher Pd content with increasing film thickness. This thickness effect is attributed to the difference in internal stress created during annealing. The martensite start temperature (M s ) of films containing 28.5-30.0 at%Pd was higher than room temperature, and it became lower with increasing Pd content. When Fe-30 at%Pd films were separated from the quartz substrate, they showed shape memory behavior upon heating after deformation.