Preparation of super-hard coatings by pulsed laser deposition

Reiße, G.; Weißmantel, Steffen; Rost, D.

doi:10.1007/s00339-004-2735-6

Cited by 15 publications

(16 citation statements)

References 7 publications

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“…[2][3][4] The merit of PLD is that it is possible to tune the properties of the films, such as the sp 3 fraction ͑up to 80%-85%͒, 5 by changing the laser fluence and the pressure of gas in the chamber. To understand the growth mechanism, the dynamics of a confined carbon plume ablated using a laser from a graphite target was studied using optical emission spectroscopy and ultrafast charge-coupled device imaging.…”

Section: Introductionmentioning

confidence: 99%

Pulsed laser deposited tetrahedral amorphous carbon with high sp3 fractions and low optical bandgaps

Miyajima

Henley

Adamopoulos

et al. 2009

Journal of Applied Physics

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Amorphous carbon films with sp 3 bonded carbon fractions over 70% are deposited by pulsed laser deposition. However, the optical bandgap obtained from optical transmittance and spectroscopic ellipsometry analysis shows the values to be below 1.0 eV. A wide range of measurements such as electron energy loss spectroscopy, visible Raman, spectroscopic ellipsometry, optical transmittance, and electrical characterization are performed to elucidate the bonding configurations that dictate microstructural, optical and electrical properties, and their linkage to band structure changes. It is found that stress-induced electronic localized states play an important role in the physical properties of the films deposited. The optical bandgap is shown not to be a good measure of the electrical bandgap, especially for high electric field conduction in these tetrahedral amorphous carbon films.

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Section: Introductionmentioning

confidence: 99%

Pulsed laser deposited tetrahedral amorphous carbon with high sp3 fractions and low optical bandgaps

Miyajima

Henley

Adamopoulos

et al. 2009

Journal of Applied Physics

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“…However, besides interesting tribological properties, those have generally reduced others (optical, optoelectronic, chemical and mechanical) [114,115,116,117,118,119]. Amorphous diamond and degraded tetrahedral amorphous carbon , ranging from materials with high internal stress such as the amorphous diamond and ta-C:H and others for which the internal stress could be reduced without graphitic degradation [120,121,122,123,124,125,126]. Polymeric carbon [127,128], although not being really diamond-like, but which contain many sp3 carbon chains and have a similar optoelectronic gap. Diamond-like a-C:H and composite material such as diamond-like glassy-carbon CNx and sp3 rich carbon nanowire and fiber [24,27,129,130,131,132,133].…”

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

“…Amorphous diamond and degraded tetrahedral amorphous carbon , ranging from materials with high internal stress such as the amorphous diamond and ta-C:H and others for which the internal stress could be reduced without graphitic degradation [120,121,122,123,124,125,126].…”

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

“…The resulting material will generally no longer combine higher diffusion barrier, optical and electric and/or dielectric properties. The harder homogeneous isotropic amorphous diamond combines many different superior interesting properties, except its electric conductivity and its internal stress which can only be annealed without degrading the initial properties with particular appropriate means (e.g., hard UV laser annealing) and when the temperature stays lower than the thermal graphitization temperature threshold [120,121,122,123,124].…”

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

“…Then, they merely correspond to some nanocomposite material containing different adjacent phases and this is often leading to dramatic confusions between materials supposed to belong to the same category, whether being stress annealed or not and presenting important material structures and property differences [27,111,112,113]. Diamond-like carbon produced with non-optimized depositing equipment design and lower optimized depositing process or which is resulting from the thermal annealing of crystalline diamond and from highly stresses harder ta-C has been often considered as an amorphous diamond, although being merely less hard, less homogeneous less smooth, less dense composite material with reduced optical properties and reduced thermal stability (in comparison to the diamond and harder tetrahedral amorphous carbon) [114,115,116,117,118,119,120,121,122,123,124,125].…”

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

See 2 more Smart Citations

Selective Carbon Material Engineering for Improved MEMS and NEMS

Neuville¹

2019

Micromachines

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The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including geometric tolerances and reproducibility of many specific solid-state structures and properties. Among those: Mechanical, adhesion, thermal and chemical stability, electrical and heat conductance, optical, optoelectronic and semiconducting properties, porosity, bulk and surface properties. They can be affected by different kinds of phase transformations and degrading, which greatly depends on the conditions of use and the way the materials have been selected, elaborated, modified and assembled. Distribution of these properties cover several orders of magnitude and depend on the design, actually achieved structure, type and number of defects. It is then essential to be well aware about all these, and to distinguish and characterize all features that are able to affect the results. For this achievement, we point out and discuss the necessity to take into account several recently revisited fundamentals on carbon atomic rearrangement and revised carbon Raman spectroscopy characterizing in addition to several other aspects we will briefly describe. Correctly selected and implemented, these carbon materials can then open new routes for many new and more performing microsystems including improved energy generation, storage and conversion, 2D superconductivity, light switches, light pipes and quantum devices and with new improved sensor and mechanical functions and biomedical applications.

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Microstructure of <111>‐Textured Cubic Boron Nitride Film Deposited under Oxygen‐Containing Atmosphere

Choi,

Huh,

Park

et al. 2023

Adv Eng Mater

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The cross‐sectional and planar microstructures of a cubic boron nitride (cBN) thin film with a <111> preferential orientation were observed using transmission electron microscopy. The cBN films were deposited by unbalanced magnetron sputtering under the condition that oxygen was added to a 20 sccm Ar‐N2(25%) gas mixture. The cross‐sectional view of the cBN film deposited with the addition of 0.4 sccm of oxygen showed a dual‐phase structure: turbostratic boron nitride (tBN) layers were filled between cBN columns, and the planar view showed that cBN crystals were surrounded by a tBN matrix. The films deposited under less than 0.4 sccm of oxygen addition showed a single‐phase structure with no tBN layers between the cBN columns. The difference between dual‐ and single‐phase structures is that they have preferred <111> and <220> orientations. This texture variation was interpreted as being due to the low residual stress of the dual‐phase‐structured cBN film and the low surface energy of the cBN (111) plane. The residual stress of the dual‐phase structure was significantly lower than that of the single‐phase structure. This is attributed to the compressive residual stress relieved by the tBN layers formed between the cBN columns.This article is protected by copyright. All rights reserved.

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Preparation of super-hard coatings by pulsed laser deposition

Cited by 15 publications

References 7 publications

Pulsed laser deposited tetrahedral amorphous carbon with high sp3 fractions and low optical bandgaps

Pulsed laser deposited tetrahedral amorphous carbon with high sp3 fractions and low optical bandgaps

Selective Carbon Material Engineering for Improved MEMS and NEMS

Microstructure of <111>‐Textured Cubic Boron Nitride Film Deposited under Oxygen‐Containing Atmosphere

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