1998
DOI: 10.1016/s0254-0584(98)00030-3
|View full text |Cite
|
Sign up to set email alerts
|

Preparation of thin films of dielectric materials using high-density ablation plasma produced by intense pulsed ion beam

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
4
0
1

Year Published

1999
1999
2013
2013

Publication Types

Select...
9
1

Relationship

1
9

Authors

Journals

citations
Cited by 21 publications
(5 citation statements)
references
References 18 publications
0
4
0
1
Order By: Relevance
“…immobilized enzymes [80,81], sterilization [82] and pasteurization [83], the textile industry [84], electronics (e.g., amorphous semiconductors [85]), electrics (insulators [86], thin film dielectrics [87]), optical applications [88,89], chemical processing (reverse osmosis membrane [90], permselective membrane [91]) and surface modification (adhesive improvement [92,93], protective coating [94,95]). For example, plasma polymerization may offer a new alternative in biosensor interface design.…”
Section: Plasma Polymerizationmentioning
confidence: 99%
“…immobilized enzymes [80,81], sterilization [82] and pasteurization [83], the textile industry [84], electronics (e.g., amorphous semiconductors [85]), electrics (insulators [86], thin film dielectrics [87]), optical applications [88,89], chemical processing (reverse osmosis membrane [90], permselective membrane [91]) and surface modification (adhesive improvement [92,93], protective coating [94,95]). For example, plasma polymerization may offer a new alternative in biosensor interface design.…”
Section: Plasma Polymerizationmentioning
confidence: 99%
“…From these results, the cation composition of the Y-123 thin film is almost the same as that of the Y-Ba-Cu-O target. Previously, various (Ba,Sr) TiO thin films have been prepared by IBE and the compositions of the films were the same as those of the targets [11]. It is characteristic of the IBE method.…”
Section: A Deposition and Characterization Of Y-123 Thin Filmmentioning
confidence: 99%
“…Π’ частности, ΠΎΠ½ΠΈ ΠΏΠΎΠ· Π²ΠΎΠ»ΡΡŽΡ‚ ΡΠΎΡ…Ρ€Π°Π½ΡΡ‚ΡŒ стСхиомСтричСский состав Π²Π΅ щСства мишСни Π² осаТдаСмых покрытиях, обСс ΠΏΠ΅Ρ‡ΠΈΠ²Π°ΡŽΡ‚ ΠΈΡ… чистоту. ΠŸΡ€ΠΈ этом достигаСтся Π΄ΠΎ вольно большая ΠΏΠ»ΠΎΡ‰Π°Π΄ΡŒ ΠΎΠ±Ρ€Π°Π±ΠΎΡ‚ΠΊΠΈ (дСсятки ΠΊΠ²Π°Π΄Ρ€Π°Ρ‚Π½Ρ‹Ρ… сантимСтров) ΠΈ приСмлСмая ΠΏΡ€ΠΎΠΈΠ·Π²ΠΎ Π΄ΠΈΡ‚Π΅Π»ΡŒΠ½ΠΎΡΡ‚ΡŒ [1][2][3]. МИИП ΠΌΠΎΠ³ΡƒΡ‚ ΠΏΡ€ΠΈΠΌΠ΅Π½ΡΡ‚ΡŒΡΡ ΠΈ для осаТдСния биосовмСстимых ΠΊΠ°Π»ΡŒΡ†ΠΈΠΉ фосфат Π½Ρ‹Ρ… ΠΏΠΎΠΊΡ€Ρ‹Ρ‚ΠΈΠΉ (КЀ ΠΏΠΎΠΊΡ€Ρ‹Ρ‚ΠΈΠΉ) Π½Π° ΠΏΠΎΠ²Π΅Ρ€Ρ…Π½ΠΎΡΡ‚ΡŒ Ρ€Π°Π·Π»ΠΈΡ‡Π½Ρ‹Ρ… ΠΈΠΌΠΏΠ»Π°Π½Ρ‚Π°Ρ‚ΠΎΠ², ΠΈΡΠΏΠΎΠ»ΡŒΠ·ΡƒΡŽΡ‰ΠΈΡ…ΡΡ Π² сто ΠΌΠ°Ρ‚ΠΎΠ»ΠΎΠ³ΠΈΠΈ, Ρ‚Ρ€Π°Π²ΠΌΠ°Ρ‚ΠΎΠ»ΠΎΠ³ΠΈΠΈ ΠΈ ΠΎΡ€Ρ‚ΠΎΠΏΠ΅Π΄ΠΈΠΈ [4][5][6].…”
Section: Introductionunclassified