2017
DOI: 10.1021/acsami.7b14082
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Preparation of Ultrasensitive Humidity-Sensing Films by Aerosol Deposition

Abstract: Aerosol deposition (AD) is a novel ceramic film preparation technique exhibiting the advantages of room-temperature operation and highly efficient film growth. Despite these advantages, AD has not been used for preparing humidity-sensing films. Herein, room-temperature AD was utilized to deposit BaTiO films on a glass substrate with a Pt interdigital capacitor, and their humidity-sensing performances were evaluated in detail, with further optimization performed by postannealing at temperatures of 100, 200, ...… Show more

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Cited by 48 publications
(33 citation statements)
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“…Aside from low-temperature fabrication and reduced energy costs, previous studies have confirmed other advantages of using the AD method, including efficient film growth, controllable thickness from 1.5–3.0 μm for ceramic films, which yields excellent sensitivity and microstructures, and long-shield raw materials, which are useful in industrial fabrication 6 . Based on the results of our previous study related to the effect of annealing on sensitivity, thermal treatment at 100 to 600 °C showed that the best capacitance was achieved at 400–500 °C 7 . Thus, based on these results, it can be deduced that the thickness and annealing of BaTiO 3 in the AD method can further improve high-k capacitance values.…”
Section: Introductionmentioning
confidence: 99%
“…Aside from low-temperature fabrication and reduced energy costs, previous studies have confirmed other advantages of using the AD method, including efficient film growth, controllable thickness from 1.5–3.0 μm for ceramic films, which yields excellent sensitivity and microstructures, and long-shield raw materials, which are useful in industrial fabrication 6 . Based on the results of our previous study related to the effect of annealing on sensitivity, thermal treatment at 100 to 600 °C showed that the best capacitance was achieved at 400–500 °C 7 . Thus, based on these results, it can be deduced that the thickness and annealing of BaTiO 3 in the AD method can further improve high-k capacitance values.…”
Section: Introductionmentioning
confidence: 99%
“…For local enlargement of the diffraction peak of the Al 2 O 3 (116) plane, the CsPbBr 3 /Al 2 O 3 layer deposited by He gas showed a larger peak shift of 0.208° as compared to the shift of 0.169° obtained by N 2 gas. The degree of peak shift and the FWHM are typically critical criteria of the physical residual stress occurring at the interfacial particle/substrate and particle/particle collisions during AD . We recognized that the kinetic energy of CsPbBr 3 /Al 2 O 3 nanocomposite particles is reflected in the crystallite size (shown in Figure a–c, which is calculated using the Scherrer equation), which leads to the consolidation of the deposited layers.…”
Section: Resultsmentioning
confidence: 97%
“…AD‐deposited BT ceramic films are of significant interest for humidity sensing applications . The efficiency of the humidity sensor prepared by AD‐processed film can be significantly improved by the porous microstructure.…”
Section: Resultsmentioning
confidence: 99%