1987
DOI: 10.1063/1.98366
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Preparation of Y-Ba-Cu oxide superconductor thin films using pulsed laser evaporation from high T c bulk material

Abstract: We report the first successful preparation of thin films of Y-Ba-Cu-O superconductors using pulsed excimer laser evaporation of a single bulk material target in vacuum. Rutherford backscattering spectrometry showed the composition of these films to be close to that of the bulk material. Growth rates were typically 0.1 nm per laser shot. After an annealing treatment in oxygen the films exhibited superconductivity with an onset at 95 K and zero resistance at 85 and 75 K on SrTiO3 and Al2O3 substrates, respective… Show more

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Cited by 1,116 publications
(271 citation statements)
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“…Pulsed laser deposition (PLD) is another technique that may be used to produce multi-element thin films [13][14][15]; here, multi-component nanostructures may be formed by simultaneous ablation of multiple targets and/or ablation of a composite target. Despite assertions that ablation of a composite target results in stoichiometric deposition [16], there have also been reported cases of non-stoichiometric thin film deposition [15,17].…”
Section: Introductionmentioning
confidence: 99%
“…Pulsed laser deposition (PLD) is another technique that may be used to produce multi-element thin films [13][14][15]; here, multi-component nanostructures may be formed by simultaneous ablation of multiple targets and/or ablation of a composite target. Despite assertions that ablation of a composite target results in stoichiometric deposition [16], there have also been reported cases of non-stoichiometric thin film deposition [15,17].…”
Section: Introductionmentioning
confidence: 99%
“…In a laser evaporation experiment [9], Y-Ba-Cu-0 thin films have been prepared by pulsed excimer laser evaporation from a bulk target, making use of the high absorptivity of YBa2Cu,07 for uv radiation. Onset of superconductivity at 95 K and zero resistance at 75 K for a thin film on a sapphire substrate (and 85 K for a film on a SrTiO, substrate) were reported [9]. Recently, films have also been produced by TEA COz laser evaporation using SrTiO, substrates [lo].…”
mentioning
confidence: 99%
“…After the successful growth of high temperature superconducting films in 1987, pulsed laser deposition (PLD) has been widely used to fabricate high quality thin films of many different materials with complex chemistries [15]. As the name implies, PLD utilizes a high power pulsed laser beam to supply energy to target materials so that they are vaporized and transported to a substrate surface [16].…”
Section: Materials Processingmentioning
confidence: 99%