Preparation of ZnMgO/ZnO heterojunction by magnetron sputtering method

Li, Hezeng; Shi, Xiaoyang; Guo, Rui; Jin, En Mei

doi:10.1117/12.2686792

International Conference on Optoelectronic Information and Functional Materials (OIFM 2023) 2023

DOI: 10.1117/12.2686792

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Preparation of ZnMgO/ZnO heterojunction by magnetron sputtering method

Hezeng Li

Xiaoyang Shi

Rui Guo

et al.

Abstract: ZnMgO/ZnO/ZnMgO heterojunctions as well as ZnMgO/ZnO/ZnMgO heterojunctions with low-temperature ZnO buffer layers were prepared on (100) Si substrates by magnetron sputtering. The crystal structures of the heterojunction films grown under the optimized process parameters were good, and the near-band edge emission peaks of the ZnMgO layer were observed in the ZnMgO/ZnO/ZnMgO heterojunction by PL test.

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2024

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Impact of Substrate upon Morphology, Luminescence, and Wettability of ZnMgO Layers Deposited by Spray Pyrolysis

Monaico,

Morari,

Buiucli

et al. 2024

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In this work, we report on a comparative study of the topology, luminescence, and wettability properties of ZnMgO films prepared by a cost-effective spray pyrolysis technology on GaAs substrates with (100), (001), and (111) crystallographic orientations, as well as on Si(100) substrates. Deposition on nanostructured GaAs substrates was also considered. It was found that film growth is not epitaxial or conformal, but rather, it is granular, depending on the nucleating sites for the crystallite growth. The distribution of nucleation sites ensured the preparation of nanostructured films with good uniformity of their topology. The observed difference in columnar growth on Si substrates and pyramidal growth on GaAs ones was explained in terms of the impact of chemical bonding in substrates. The films grown on GaAs substrates with a (001) orientation were found to be made of larger crystallites compared to those deposited on substrates with a (111) orientation. These effects resulted in a difference in roughness of a factor of 1.5, which correlates with the wetting properties of films, with the most hydrophobic surface being found on films deposited on GaAs substrates with a (111) orientation. The prospects for photocatalytic and gas sensor applications of films produced on flat substrates, as well as for plasmonic and other applications of films deposited on nanostructured substrates, are discussed, taking into account the results of the analysis of their photoluminescence properties.

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Impact of Substrate upon Morphology, Luminescence, and Wettability of ZnMgO Layers Deposited by Spray Pyrolysis

Monaico,

Morari,

Buiucli

et al. 2024

Coatings

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show abstract

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Preparation of ZnMgO/ZnO heterojunction by magnetron sputtering method

Cited by 1 publication

References 11 publications

Impact of Substrate upon Morphology, Luminescence, and Wettability of ZnMgO Layers Deposited by Spray Pyrolysis

Impact of Substrate upon Morphology, Luminescence, and Wettability of ZnMgO Layers Deposited by Spray Pyrolysis

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