Keywords: Tantalum / Nitrides / Plasma-enhanced chemical vapor deposition / X-ray diffraction / Electron microscopy Microcrystalline tantalum nitride films were prepared on various substrates from TaCl 5 precursor and nitrogen gas using the plasma-enhanced chemical vapor deposition (PECVD) method. Syntheses carried out at 600−650°C led to single-phase samples of the tantalum nitride Ta 2 N 3 with a defect fluorite-type structure. The anion vacancies were found to order resulting in a 2 ϫ 2 ϫ 2 cubic superstructure of the C-Ln 2 O 3 type (space group Ia3 , Z = 16) with a = 9.8205(4) Å according to a Rietveld refinement of the X-ray
IntroductionThe binary TaϪN system is quite rich in compounds with well-defined and variable stoichiometries. The formal oxidation state of tantalum covers the whole range from nearly zero to the maximum of ϩ5. These compounds can be divided into four groups: solid solutions of nitrogen in tantalum, the phase with the approximate stoichiometry Ta 2 N, three phases with a nearly 1:1 composition, and nitrogenrich nitrides. A few comprehensive reviews of tantalum nitride structural chemistry are available.[1Ϫ3] Results of the previous structural studies in this binary system are summarized in Table 1.Up to 5 at.% of nitrogen can be dissolved in the bodycentered cubic lattice of elemental tantalum, for example by heating of Ta powder in ammonia at 600Ϫ700°C.[3] The lattice constant of such solid solutions increases slightly to 3.315Ϫ3.369 Å compared to that of the pure metal (a ϭ 3.311 Å ). Observation of additional weak reflections suggests a cubic superstructure with the unit cell tripled in all directions and with a β ϭ 3a α ϭ 10.11 Å . The γ-phase with the composition range TaN 0.41Ϫ0.5 , also denoted as β-Ta 2 N, [4] crystallizes with a hexagonal unit cell.[1Ϫ4] Its crystal structure can be described as a hexagonal close packing of the tantalum atoms with the nitrogen atoms filling half of the octahedral interstices. While the earlier studies suggested a statistical distribution, [1,2] electron- [3] and neutron-diffraction [4] investigations revealed a trigonal P31m supercell with aЈ ϭ Ί3a, isostructural to β-Nb 2 N [14] and of the anti-Li 2 ZrF 6 -type.[15] The γ-phase can be obtained by nitriding of tantalum powder in gaseous ammonia at 800Ϫ900°C or from the elements at 2000°C. [1,3] The hexagonal ε-phase was proposed by Schoenberg [1] to have a B35 CoSn-type structure with the composition TaN 1.00 ; the same description was given by Brauer and Zapp.[2] In this structure type the nitrogen atoms are at the center of slightly distorted tantalum octahedra. Later, Christensen and Lebech [5] showed that the nitrogen atoms are displaced from these ideal positions reducing their coordination sphere to a square pyramid. The unit cell determined by Christensen and Lebech [5] (a ϭ 5.196 Å , c ϭ 2.911 Å ) is quite similar to that given by the other authors.[1Ϫ3] The ε-phase can be obtained as a product of nitriding of Ta powder at temperatures at Ͼ 1100°C. [1] Another modification of tantalum ...