Preparing an ultra-smooth TaW alloy surface with chemical mechanical polishing via controlling galvanic corrosion

Zhao, Qijian; Tian, Chuandong; Zheng, Jiaxin; Sun, Pengfei; Jiang, Liang; Qian, Linmao

doi:10.1007/s10800-023-01986-w

J Appl Electrochem

2023

DOI: 10.1007/s10800-023-01986-w

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Preparing an ultra-smooth TaW alloy surface with chemical mechanical polishing via controlling galvanic corrosion

Qijian Zhao,

Chuandong Tian,

Jiaxin Zheng

et al.

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Preparing an ultra-smooth TaW alloy surface with chemical mechanical polishing via controlling galvanic corrosion

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References 49 publications

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