Present Position and Future Developments of Ion Implantation to Metals

Abstract

The interdependence between subsurface layer mechanical and chemical properties and its microstructure is discussed. The microstructure of the layer can be controlled by the choice of the implanted atomic species, their dose, and energy. Two phases can be produced: the metastable crystalline and the amorphous one by direct implantation into the matrix and by ion mixing at the interface of two‐layered structures. Description of the effects obtained by implantation of nitrogen and titanium into steel is given. Suggestions concerning the directions of further research work on ion implantation are made.