2011
DOI: 10.3131/jvsj2.54.339
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Present Status and Prospects of Large Diameter SiC Single Crystal Substrates

Abstract: Solving the global warming problem is a great challenge before us, and energy conservation with more e‹cient use of electricity is the deˆnite way to mitigate the problem since it is the most widely used energy source at home and in the industry. Hence, power electronics is now expected to play a vital role in the global energy conservation scenario. Present-day Si power electronics, however, suŠer from the performance limitations due to their material properties. Wide band gap semiconductor silicon carbide (S… Show more

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