Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography

Hirai, Yoshihiko; Ônishi, Yoshihiro; Tanabe, Toshiaki; Shibata, Mayuko; Iwasaki, Takuya; Iriye, Yasuroh

doi:10.1016/j.mee.2007.12.084

Cited by 27 publications

(17 citation statements)

References 3 publications

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“…The weights, w w and w d , can be calculated using the AHP method (Analytic Hierarchy Process) . The depth of the replication accuracy x d declines more quickly than the width replication accuracy x w , that is, the heated polymer flows more easily in the depth direction than it flows in the width direction. Consequently, the impact of x w is slightly more significant than x d for the replication accuracy of a 2D PET nanochannel.…”

Section: Resultsmentioning

confidence: 99%

Analysis of polymer viscoelastic properties based on compressive creep tests during hot embossing for two‐dimensional polyethylene terephthalate nanochannels

Yin

Cheng

Zou

et al. 2013

Polymer Engineering & Sci

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Hot embossing is an emerging technology, which enables cost‐effective and high‐productivity nanofabrication. It is important to optimize the processing parameters to achieve high replication accuracy nanostructure fabrication. In this article, to reveal the interrelationship between the hot embossing conditions and replication accuracy of two‐dimensional (2D) polyethylene terephthalate (PET) nanochannels, the numerical simulations were conducted by using the generalized Maxwell model. The constants of the generalized Maxwell model were calculated by a newly established fitting formula based on experimental compressive creep curves rather than tensile stress relaxation curves. Replication accuracy of 2D PET nanochannels was evaluated by a method based on weighted averages. Orthogonal method was employed during numerical simulations to optimize the hot embossing process. Under optimized hot embossing parameters, 2D PET nanochannels, ∼80 nm wide, 250 nm deep and 4 mm long, were precision‐imprinted into a PET sheet. POLYM. ENG. SCI., 54:2398–2406, 2014. © 2013 Society of Plastics Engineers

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Section: Resultsmentioning

confidence: 99%

Analysis of polymer viscoelastic properties based on compressive creep tests during hot embossing for two‐dimensional polyethylene terephthalate nanochannels

Yin

Cheng

Zou

et al. 2013

Polymer Engineering & Sci

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“…For computational study, conventional Finite Element method is applied [14][15][16][17][18][19][20]. Generalized Maxwell model [21] was used for the polymer model as illustrated in Fig.…”

Section: Computational Modelmentioning

confidence: 99%

Study on Induced Stress and Strain in Direct Nanoimprint Lithography

Iida

Yasuda

Kawata

et al. 2016

J. Photopol. Sci. Technol.

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Induced stress and strains in direct nanoimprint process are investigated by computational works. Impact of the mold pressing velocity, the polymer thickness, and the side wall angle of the mold are studied for the model polymer and PMMA. The shear stress distribution in pattern cavity is strongly affected by the polymer thickness and the side wall angle of the mold. By inclination of the side wall, the shear stress is spread into pattern cavity in triangular shaped cavity due to polymer flow along the side wall, which may induce molecular ordering. On the other hand, stress and strain distributions are hardly affected by the mold pressing velocity under investigated conditions.

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“…Many researchers did efforts about the polymer formation by hot embossing. Heyderman et al [1] studied the flow behavior of PMMA in the filling process of concave model; the pressure distribution of polymer materials in hot embossing was simulated based on 3 units viscoelastic model by Lin et al [2]；According to the 24units generalized Maxwell viscoelastic model, the deformation of PMMA was researched with changing the pressure, temperature and time in hot embossing process by Hirai [3]; the effect of model structure and the material initial thickness on deformation quality were studied by Kim [4]; Lan [5] got the relaxation features of PC polymer at the glass transition temperature. Whereas, the above experimental and simulation researches about polymer formation are mostly focus on the materials of PMMA or PC, which glass transition temperature is higher relatively.…”

Section: Introductionmentioning

confidence: 99%

Study on the Stress Relaxation Property of Degradable Polymer PLGA

Gao¹,

Huo²

2015

Proceedings of the 2015 2nd International Workshop on Materials Engineering and Computer Sciences

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Multi-Microstructures are designed as the carriers of controlled drug delivery system, and the degradable polymer is the preferred material. When the deform method is hot embossing, the viscoelasticity of degradable polymer becomes one of the important parameters which affect the quality of microstructure. So the viscoelasticity and stress relaxation property of polymer is researched in this paper by experiment, and the numerical material model was established based on the generalized Maxwell model with 5 units by the Finite Element Method, The simulation results show that the model is reasonable and give the base for the research of optimum forming parameters of microstructure forming by hot embossing.

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Pressure and resist thickness dependency of resist time evolutions profiles in nanoimprint lithography

Cited by 27 publications

References 3 publications

Analysis of polymer viscoelastic properties based on compressive creep tests during hot embossing for two‐dimensional polyethylene terephthalate nanochannels

Analysis of polymer viscoelastic properties based on compressive creep tests during hot embossing for two‐dimensional polyethylene terephthalate nanochannels

Study on Induced Stress and Strain in Direct Nanoimprint Lithography

Study on the Stress Relaxation Property of Degradable Polymer PLGA

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