Magnetron sputtered and laser deposited SrTiO 3 thin films are deposited on CeO 2 buffered sapphire substrates. Their structural properties are investigated and correlated to the dielectric properties of the SrTiO 3 films. It is shown, that the biaxial compressive strain imposed by the substrate on the ferroelectric films leads to a considerable increase of the permittivity and tunability of SrTiO 3 thin films in technically relevant temperature regimes. Generally, the permittivity and tunability decreases with increasing strain. However, the ferroelectric phase transition of the SrTiO 3 films is shifted to higher temperatures compared to that of single crystalline SrTiO 3 . As a consequence, the permittivity of the films is larger than that of undistorted SrTiO 3 single crystals for small strain (Δa/a<0.005) and temperatures above the Curie temperature. Furthermore, a linear dependence of the loss tangent and the tunability on the permittivity is observed, which indicates, that all three properties are affected by the same mechanism that itself is affected by the lattice strain.