In order to understand the mechanisms behind the emergence of superconductivity by the chemical pressure effect in REO0.5F0.5BiS2 (RE = La, Ce, Pr, and Nd), where bulk superconductivity is induced by the substitutions with a smaller-radius RE, we performed synchrotron powder X-ray diffraction, and analyzed the crystal structure and anisotropic displacement parameters. With the decrease of the RE 3+ ionic radius, the in-plane disorder of the S1 sites significantly decreased, very similar to the trend observed in the Se-substituted systems: LaO0.5F0.5BiS2-xSex and Eu0.5La0.5FBiS2-xSex. Therefore, the emergence of bulk superconductivity upon the suppression of the in-plane disorder at the chalcogen sites is a universal scenario for the BiCh2-based superconductors. In addition, we indicated that the amplitude of vibration along the c-axis of the in-plane chalcogen sites may be related to the Tc in the BiCh2-based superconductors. . In addition, the observed temperature dependence of the electrical resistivity was not metallic-like; it showed a weakly localized behavior in LaO1-xFxBiS2, although band calculations suggested that the electron-doped LaO1-xFxBiS2 should be metal [4,5,12]. These results suggested that the doped electrons were localized by the effect of structural disorder.In order to induce bulk superconductivity in LaO1-xFxBiS2, high pressure effects can be employed.The application of an external pressure induces bulk superconductivity with a Tc of ~10 K [13][14][15]. In addition, samples annealed under a high pressure (~2 GPa) also exhibit bulk superconductivity with aTc of ~10 K [2,[16][17][18]. The emergence of bulk superconductivity and increase of Tc in the highpressure phase can be attributed to the structural phase transition from the tetragonal low-Tc phase to the monoclinic high-Tc phase [13].Another approach to induce bulk superconductivity in the LaO1-xFxBiS2 system is to introduce a chemical pressure by an isovalent substitution, such as Ch (Ch: S, Se) and/or RE site substitutions. In LaO0.5F0.5BiS2-xSex, the substitutions of Se for the S sites induces bulk superconductivity with a Tc of ~3.8 K [19,20]. Another isovalent substitution is the RE site substitution. With the decrease of the RE 3+ (mean) ionic radius in REO0.5F0.5BiS2, the BiS2 layer becomes compressed, in particular along the ab-plane direction, and bulk superconductivity is induced [21]. As the isovalent substitution does not significantly affect the carrier concentration, the structural optimization induces superconductivity in the Ch-and RE-substituted systems. In order to analyze the essential factor for the emergence of the superconductivity, we considered the commonality of the chemical pressure effects between the Ch-and RE substitutions, by introducing the concept of an in-plane chemical pressure [22].The emergence of the bulk superconductivity in the LaO0.5F0.5BiS2-xSex system was explained by the decrease in the in-plane disorder of the chalcogen sites with the increase of the Se content, which was detected thro...