Density functional theory simulations are used to predict ground state crystal structures, electronic properties, and thermodynamic stability of a new class of Si 1-x Ge x N 2 O oxynitride materials with potential applications as tunable dielectrics. Thermochemical simulations are also used to explore their possible synthetic routes via reactions of ammonia with (a) mixtures of (SiH 3 ) 2 O and (GeH 3 ) 2 O, and (b) a singlesource heteronuclear analogue SiH 3 OGeH 3 . To obtain quantitative values for the above reaction energies we implement a consistent computational methodology to simulate the structural and thermochemical properties of both molecular and solid state reactants and products at finite-temperature. In the case of the wellknown (SiH 3 ) 2 O and (GeH 3 ) 2 O compounds our calculated molecular structures and vibrational spectra are in excellent agreement with experiment. The hypothetical SiH 3 OGeH 3 molecule is predicted to possess an intermediate molecular structure and energy, with stability differences on the order of 1-2 kcal/mol between SiH 3 OGeH 3 and mixtures of (SiH 3 ) 2 O/(GeH 3 ) 2 O. For the solids we predict two new ordered structures: (i) an R-SiGeN 2 O phase composed of a uniform distribution of SiN 3 O and GeN 3 O tetrahedra, and (ii) a "pseudo-lamellar" form β-SiGeN 2 O in which the SiN 3 O and GeN 3 O units occupy alternating layers. The structural, electronic, and thermoelastic properties of the latter are then systematically compared to those of Si 2 N 2 O and Ge 2 N 2 O. Here again, small energy differences comparable to those in the molecular case are found between the SiGeN 2 O polytypes and their Si 2 N 2 O/Ge 2 N 2 O analogues. The enthalpy of formation of R-SiGeN 2 O, β-SiGeN 2 O, and a random SiGeN 2 O alloy are predicted to be comparable, indicating that mixing entropy should favor the disordered solid at high temperatures. Collectively, a remarkable consistency is found for the bond-lengths and bond-angles across molecular and solid-state forms. From an experimental perspective, the recent development of industrial scale synthesis for (SiH 3 ) 2 O suggests that the Ge-based analogues proposed here might be accessed using similar approaches, opening the door to new chemically compatible Si-Ge-O-N high-k gate materials for high mobility Si-Ge based applications.