Pressure sensor diaphragm modelling and deformation analysis

Abstract

This paper develops Micro-electromechanical Systems-based pressure sensor diaphragms (MEMS). This paper aims to build, model, and test a MEMS-based diaphragm that uses numerous structures of the same area and material to sense differential pressure. Similar goals: Diaphragm deflection and sensitivity were studied using COMSOL multiphysics software. LTspice is a high-performance SPICE simulator with a graphical schematic capture interface. The diaphragm bends when pressure changes, affecting the substrate-diaphragm displacement in COMSOL and the voltage output in LTspice via changing the resistances of three sensors. Voltage output changes with diaphragm bending. Changing voltage and displacement indicate environmental pressure. This method improves instrument response. In this work, a circular diaphragm-based pressure sensor has higher displacement, sensitivity, and stress output responses than a square or rectangular one.