Primary and transfer standards for vacuum and mass flow in an industrial calibration facility

Hinkle, L. D.; Uttaro, F.L

doi:10.1016/0042-207x(96)00012-7

Cited by 6 publications

(3 citation statements)

References 25 publications

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“…This assumption is well met in the case of noble gases, which at room temperature do not adhere to the surface of the vessel walls. Then the gas follows the equation of state, which for an ideal gas reads (1) Table 1 gives a list of the symbols used in this paper. Under ambient conditions, the real gases used in calibrations show minor but non-negligible deviations from the ideal gas law to the order of ±1 part in 10 3 .…”

Section: Principle Of Generating Calibration Pressure By Static Gas E...mentioning

confidence: 99%

“…In these gauges, the pressure causes a deformation of a thin diaphragm and this deformation is accurately detected electronically by the change of capacity between the diaphragm and an electrode. Such high-quality gauges can achieve high repeatability within a short space of time (a few days) to the order of 1 part in 10 4 [1,2], as well as zero-stability during calibration to the order of 1 10 -3 Pa. In the case of smaller pressure, the spinning rotor gauge (SRG) is a wellproven transfer standard.…”

Section: Introductionmentioning

confidence: 99%

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High-accuracy calibration in the vacuum range 0.3 Pa to 4000 Pa using the primary standard of static gas expansion

Jitschin¹

2002

Metrologia

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Static gas expansion provides a convenient primary standard for calibrating pressure gauges in the medium vacuum range. This paper reports on a thorough investigation of the fundamental principle, possible disturbances and achievable uncertainty of such an apparatus. The method is described and model equations for the general case of a non-isothermal expansion of a real gas are derived. As temperature effects play an essential role in the uncertainty budget, the vessels of the apparatus were immersed in a temperature-controlled circulating water bath. In addition, the inherent transient temperature effects originating from the gas expansion process itself were studied experimentally, which leads to a better understanding of these effects. As a result, uncertainties caused by temperature effects could be substantially reduced. Furthermore, deviations between different real gases were studied. The investigations led to greater accuracy of the primary standard apparatus, i.e. an expanded relative uncertainty of 1 10 -3 at a pressure of 10 Pa and of 5 10 -4 at 1000 Pa.

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Section: Principle Of Generating Calibration Pressure By Static Gas E...mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

High-accuracy calibration in the vacuum range 0.3 Pa to 4000 Pa using the primary standard of static gas expansion

Jitschin¹

2002

Metrologia

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“…[1][2][3][4][5] The various national standards labs and other metrology labs, have reported uncertainties of 0.15%-0.3% of reading in the range of pressures from 0.1 to 1 Pa, and somewhat better in the range extending to 10 Pa. [6][7][8][9][10] A calibration technique being developed in this facility is based on the gravitational force applied to a diaphragm, while tilted at known angles relative to horizontal. [1][2][3][4][5] The various national standards labs and other metrology labs, have reported uncertainties of 0.15%-0.3% of reading in the range of pressures from 0.1 to 1 Pa, and somewhat better in the range extending to 10 Pa. [6][7][8][9][10] A calibration technique being developed in this facility is based on the gravitational force applied to a diaphragm, while tilted at known angles relative to horizontal.…”

Section: Introductionmentioning

confidence: 99%

Primary pressure standard for calibration in the medium vacuum range

Hinkle

Provost

Surette

1997

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Wide dynamic range silicon diaphragm vacuum sensor by electrostatic servo systemPrimary standards for gas pressure in the range from ϳ0.1 to 10 Pa ͑1 to 100 mTorr͒ have received a significant amount of attention in recent years. The interest in the calibration capability in this vacuum range is, to some degree, driven by the increasingly stringent requirements for the semiconductor processing industry. We present a new standard that is based on calculating the gas pressure required to restore a diaphragm to a null position, while the diaphragm is tilted to various, measured inclinations. With this as a basis, the calculations are relatively simple; there are no gas property dependent effects; and the system design is simple, robust, and easily automated. A formal evaluation of uncertainty for the system being developed in this facility is reviewed and compared with other primary standards. For the medium vacuum range, it is anticipated that this standard will offer numerous practical advantages relative to liquid manometers, dead weight testers, volume expansion systems, and conductance-based systems. It is intended that this technique will enable more widespread capability for the calibration, and verification of vacuum gauging in a pressure range of critical interest to many processes.

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Flow Meters

2023

A Users Guide to Vacuum Technology

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Primary and transfer standards for vacuum and mass flow in an industrial calibration facility

Cited by 6 publications

References 25 publications

High-accuracy calibration in the vacuum range 0.3 Pa to 4000 Pa using the primary standard of static gas expansion

High-accuracy calibration in the vacuum range 0.3 Pa to 4000 Pa using the primary standard of static gas expansion

Primary pressure standard for calibration in the medium vacuum range

Flow Meters

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