Principle Research on a Single Mass Six-Degree-of-Freedom Accelerometer With Six Groups of Piezoelectric Sensing Elements

Abstract

This paper presents a novel six-degree-offreedom (six-DOF) accelerometer that based on single mass structure for determination of spatial vibration characteristics, which employs six groups of piezoelectric quartzes as acceleration sensing elements. The operating principle of the proposed six-DOF accelerometer is analyzed, and its analytical model and structure model are constructed. The numerical simulation model [finite-element model (FEM)] of the proposed six-DOF accelerometer is also established, and its output sensitivity, static characteristics, dynamic natural frequency, and so on are analyzed by FEM tools (ANSYS software). There is a consistency between the analytical model and the result of numerical simulation model. The research results show that the single mass six-DOF accelerometer with six groups of piezoelectric sensing elements can accurately measure six-DOF acceleration, and has advantages of simple and rational structure, correct sensing principle and mathematic model, good linearity, high stiffness, theoretical natural frequency is >10.2 kHz, and nice manufacturability.Index Terms-Six-DOF accelerometer, piezoelectric quartz, acceleration measurement, acceleration transducer. 1530-437X

Forward and Inverse Dynamics of a Six-Axis Accelerometer Based on a Parallel Mechanism

“…The above-mentioned defects can be solved by integrating the inertial units of the sensor into a whole, that is, the sensor has only one inertial unit. Lv et al [ 16 ] proposed and studied a six-axis accelerometer based on six sets of quartz crystal sets and analyzed the linear mapping between inputs and outputs. Meng et al [ 17 ] proposed a six-axis accelerometer with a dual annular membrane structure, and used ANSYS software to determine the corresponding relationship between the deformation of the diaphragm and the mass inertial force.…”

Nonlinear dynamics under varying temperature conditions of the resonating beams of a differential resonant accelerometer

“…MEMS accelerometers are sensors able to measure the external acceleration by exploiting different physical phenomena. The most common ones are capacitive (see [3,4]), piezoelectric (see [5,6]), piezoresistive (see [7]) and resonant (see [8][9][10][11]).…”

Progression of the vibratory analysis technique by improving the piezoelectric sensor measurement accuracy

“…The vibratory analysis technique is considered as a measurement chain consisting of a sensor, amplifier and Fast Fourier Transform (FFT) analyzer, we can improve it by the progress of the performances of one of the elements of this chain . In our work, we will improve the parameters of the piezoelectric sensor as well as their performances to have a more developed vibratory analysis technique.…”