“…Scanning electron microscopes (SEM) with low‐voltage columns, in which the landing energy at the sample is below 5 keV, have significant advantages across many applications, including microscopy, lithography, electron beam testing, and inspection (Yau et al ., '81; Reimer, '93; Thong, '93). In particular, low‐voltage microscopy excels at the formation of high‐resolution, high‐contrast images of surfaces in structures where the volumes of interest approach nanometer dimensions.…”