Generally, gear is an essential component in various electro-mechanical devices, but its manufacturing at the micro-level is challenging. The non-conventional manufacturing processes, such as electro-discharge machining (EDM), is suitable in gear fabrication. Although miniature gears have strict accuracy requirements, the optimization of the EDM process parameters, especially for advanced materials and alloys, is critical. In this paper, Nimonic alloy miniature gears are manufactured using wire-EDM and the effect of process parameters, such as peak current, pulse-off (POFF) time, pulse-on (PON) time, wire tension, and dielectric fluid on the response factors are analyzed. The primary response factors, such as surface roughness, machining time, material removal rate, kerf width (KW), surface microhardness, and depth of microhardness are considered. Also, different dielectric fluids are prepared, which include ethylene glycol mixed demineralized water, oxygen mixed demineralized water, ethylene glycol and alumina powder mixed demineralized water, and ethylene glycol alumina powder and oxygen mixed demineralized water. Furthermore, the effect of process parameters on the multi-response using Pareto ANOVA has been analyzed. The results demonstrate that ethylene glycol mixed demineralized water, as a dielectric fluid, is the most influencing parameter to reduce the surface roughness, machining time, KW, and improve micro-hardness. Thus, dielectric fluid is an essential factor obtained from multi-response optimization followed by peak current, POFF time, wire tension, and PON time.