Probabilistic Sensitivity Analysis of Wear Property for MEMS Gas Bearing

Li, Liangliang; Zhang, Di; Xie, Yonghui

doi:10.3390/app9204409

Cited by 4 publications

(5 citation statements)

References 25 publications

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“…Gas-lubricating microbearings have been widely applied in aerospace [1], precision manufacturing [2], micromachine operation [3] and other fields. There is a large difference in the comprehensive performance in different conditions, and the temperature is one of the most important parameters that affects the performance of microbearings.…”

Section: Introductionmentioning

confidence: 99%

Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Liu

Wang

et al. 2020

Micromachines

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Gas-lubricated microbearings are widely applied in multiple fields due to their advantages of high-speed, low friction level and other features. The operating environment of microbearings is complex, and the difference of temperature has an important influence on their comprehensive performance. In this investigation, FEM (finite element method) is employed to investigate the static, dynamic and limit characteristics of microbearings lubricated by different kinds of gas at different temperatures. The results show that the rise of temperature leads to the decline of equivalent viscosity of gas, which weakens the load capacity of microbearings, and furthermore, affects the operating stability of microbearings. The dynamic performances of microbearings at different temperatures are very different, and the two dynamic limit characteristics are more sensitive to temperature when it changes.

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Section: Introductionmentioning

confidence: 99%

Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Liu

Wang

et al. 2020

Micromachines

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“…The detail derivation of gas film thickness expression is given in literature (Li et al, 2019a(Li et al, , 2019b. The film thickness of the clearance gives the following:…”

Section: Figure 1 Schematic Diagram Of the Rotor-bearing System With Misalignmentmentioning

confidence: 99%

“…As a more in-depth study, except the eccentricity ratio, the geometric and operating parameters of MEMS bearing are the same as those in literature (Li et al, 2019a(Li et al, , 2019b.…”

Section: Figure 1 Schematic Diagram Of the Rotor-bearing System With Misalignmentmentioning

confidence: 99%

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Effect of misalignment and rarefaction effect on the comprehensive characteristic of MEMS gas bearing

Xie

2020

ILT

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Purpose Owing to the development of the smaller-sized rotational machinery, the demand for the high-speed and low-resistance gas bearing increases rapidly. The research of micro gas bearing in the condition of rarefied gas state is still not satisfied. Therefore, the purpose of this paper is to present a numerical investigation of the effect of misalignment and rarefaction effect on the comprehensive performance of micro-electrical-mechanical system (MEMS) gas bearing. Design/methodology/approach The Fukui and Kaneko model is expanded to 2D solution domain to describe the flow field parameters. The finite element method is used to discretize the equation. Newton–Raphson method is used to solve the nonlinear equations for the static performance of gas bearing, and partial deviation method is adopted for the solution of dynamic equations. Findings The static and dynamic characteristics of MEMS gas bearing are calculated, and the comparison is made to study the influence of rarefaction effect and misalignment. The results show that the rarefaction effect will decrease bearing load capacity compared with traditional solution of Reynolds equation, and the misalignment will reduce the stability of bearing. The influence of misalignment on gas film thickness is also analyzed in this paper. Originality/value The investigation of this paper emerges the change regularity of comprehensive performance of MEMS gas bearing considering rarefaction effect and misalignment, which provides a reference for the actual manufacturing of MEMS gas bearing and for the safety operation of micro dynamic machinery. Peer review The peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-01-2020-0023/

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“…Gas journal microbearing is of great importance in various microelectromechanical systems (MEMS) devices such as ultrasonic motors, micro-gas turbines, microaccelerometers, inertial navigation systems and magnetic hard disk drives (HDD) [1][2][3]. Due to the continuous development of rotating machinery for high precision, miniaturization, low energy consumption and long life span.…”

Section: Introductionmentioning

confidence: 99%

Research on Static and Dynamic Characteristics of Gas-lubricated Microbearings for Microfluidic Devices

Liu

2020

Applied Sciences

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Aerodynamic journal microbearings with microtribological phenomena significantly influence the operating stability of microfluidic devices. The modified Reynolds equations including different rarefaction models are derived and are solved by the partial derivative method and relaxation iteration algorithm. The effects of Knudsen number and bearing parameters on the static and dynamic characteristics of microbearings are investigated in detail. The results show that the rarefaction effect plays a crucial role in the ultra-thin gas film lubrication. The maximum film pressure of Fukui–Kaneko (FK) model is lowest and the result in Boltzmann model is largest in small Knudsen number regions. As the Knudsen number increases further, the curve of FK model is coincident with that of the Boltzmann model in the transition regime. The direct stiffness coefficients of Boltzmann model increase with the increase of eccentricity ratio and aspect ratio, whereas the effect of Knudsen number on the damping coefficients yields a relatively complicated trend.

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Probabilistic Sensitivity Analysis of Wear Property for MEMS Gas Bearing

Cited by 4 publications

References 25 publications

Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Effect of misalignment and rarefaction effect on the comprehensive characteristic of MEMS gas bearing

Research on Static and Dynamic Characteristics of Gas-lubricated Microbearings for Microfluidic Devices

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