Probe Measurements in Electronegative Plasmas: Modeling the Perturbative Effects of the Probe‐Holder

Kudryavtsev, A. A.; Demidov, V. I.; DeJoseph, C.A.; Adams, Steven; Serditov, K. Yu.

doi:10.1002/ctpp.200910034

Cited by 3 publications

(2 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…(9). In an anisotropic plasma, the second derivative of j e with respect to V at any point of the probe is equal to FIG.…”

Section: Measurements In Anisotropic Plasmasmentioning

confidence: 99%

“…4,7,8 Therefore, in principle, a probe allows us to study the 2D and 3D spatial and angular distributions of electrons in plasmas. 9 The possibility of a probe providing high 2D and 3D resolution does not imply the necessity to have such high resolution to study a particular type of plasma. This issue has not been discussed in detail or clarified in the literature, including in recent probe reviews.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Probe diagnostics of electron distributions in plasma with spatial and angular resolution

Demidov

Kudryavtsev

2014

Physics of Plasmas

Self Cite

View full text Add to dashboard Cite

Articles you may be interested inAssessment of plasma impedance probe for measuring electron density and collision frequency in a plasma with spatial and temporal gradients Phys. Plasmas 21, 053501 (2014); 10.1063/1.4874321Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes This paper discusses the spatial resolution that is required to study inhomogeneous, low-temperature plasmas and is based on a review of low-temperature plasma electron kinetics and methods for probe measurements of electron energy distribution functions (EEDFs). It is stated that EEDFs can be extracted from probe measurements by applying an appropriate probe theory. The Druyvesteyn formula is most commonly used for this extraction and has been used in numerous publications, but more general theory can be used for a wider range of gas pressures. It is demonstrated that the Druyvesteyn formula can be obtained from the general theory as a limiting case. This paper justifies the application of wall probes in plasma studies of an energetic part of EEDFs. This justification is made for an idealized probe. We briefly review the methods for studying anisotropic plasmas and their usefulness in plasma research. It is demonstrated that to determine anisotropic electron energy distribution functions, a planar, one-sided probe is most convenient. V C 2014 AIP Publishing LLC. This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 155.33.16.124 On: Tue, 25 Nov 2014 17:24:38 093506-2 V. I. Demidov and A. A. Kudryavtsev Phys. Plasmas 21, 093506 (2014) This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 155.33.16.124 On: Tue, 25 Nov 2014 17:24:38 093506-4 V. I. Demidov and A. A. Kudryavtsev Phys. Plasmas 21, 093506 (2014) This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 155.33.16.124 On: Tue, 25 Nov 2014 17:24:38 FIG. 7. Fine structure of the electron energy spectra in 200 Torr He, 0.2% Ar, modulating voltage 0.6 V, cathode-anode gap 1.7 mm, and discharge current: (1) 4 mA and (2) 8 mA. 093506-5 V. I. Demidov and A. A. Kudryavtsev Phys. Plasmas 21, 093506 (2014) This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 155.33.16.124 On: Tue, 25 Nov 2014 17:24:38 093506-6 V. I. Demidov and A. A. Kudryavtsev Phys. Plasmas 21, 093506 (2014) This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitation.aip.org/termsconditions. Downloaded to IP: 155.33.16.124 On: Tue,

show abstract

“…(9). In an anisotropic plasma, the second derivative of j e with respect to V at any point of the probe is equal to FIG.…”

Section: Measurements In Anisotropic Plasmasmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Probe diagnostics of electron distributions in plasma with spatial and angular resolution

Demidov

Kudryavtsev

2014

Physics of Plasmas

Self Cite

View full text Add to dashboard Cite

show abstract

Influence of the size of the Langmuir probe insulator on the measurements of inhomogeneous plasma parameters in a discharge with a hollow cathode

Bernatskiy,

Draganov,

Dyatko

et al. 2024

Vacuum

View full text Add to dashboard Cite

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

Godyak¹,

Demidov²

2011

J. Phys. D: Appl. Phys.

323

273

View full text Add to dashboard Cite

An electric-probe method for the diagnostics of electron-distribution functions (EDFs) in plasmas is reviewed with emphasis on receiving reliable results while taking into account appropriate probe construction, various measurement errors and the limitations of theories. The starting point is a discussion of the Druyvesteyn method for measurements in weakly ionized, low-pressure and isotropic plasma. This section includes a description of correct probe design, the influence of circuit resistance, ion current and plasma oscillations and probe-surface effects on measurements. At present, the Druyvesteyn method is the most developed, consistent and routine way to measure the EDF. The following section of the review describes an extension of the classical EDF measurements into higher pressures, magnetic fields and anisotropic plasmas. To date, these methods have been used by a very limited number of researchers. Therefore, their verification has not yet been fully completed, and their reliable implementation still requires additional research. Nevertheless, the described methods are complemented by appropriate examples of measurements demonstrating their potential value.

show abstract

Probe Measurements in Electronegative Plasmas: Modeling the Perturbative Effects of the Probe‐Holder

Cited by 3 publications

References 18 publications

Probe diagnostics of electron distributions in plasma with spatial and angular resolution

Probe diagnostics of electron distributions in plasma with spatial and angular resolution

Influence of the size of the Langmuir probe insulator on the measurements of inhomogeneous plasma parameters in a discharge with a hollow cathode

Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?

Contact Info

Product

Resources

About