Two powerful and complementary techniques for chemical characterisation of nanoscale systems are electron energy-loss spectroscopy in the scanning transmission electron microscope, and X-ray absorption spectroscopy in the scanning transmission X-ray microscope. A correlative approach to spectromicroscopy may not only bridge the gaps in spatial and spectral resolution which exist between the two instruments, but also offer unique opportunities for nanoscale characterisation. This review will discuss 10 the similarities of the two spectroscopy techniques and the state of the art for each microscope. Case studies have been selected to illustrate the benefits and limitations of correlative electron and X-ray microscopy techniques. In situ techniques and radiation damage are also discussed.
IntroductionGrowth in the development and applications of nanotechnology 15 brings with it an increasing need for characterisation methods capable of providing both structural and chemical analysis on the nanometre scale. Most laboratory based characterisation techniques such as ultra-violet and infra-red spectroscopies, mass spectrometry and thermogravimetric analysis provide spatially 20 averaged information from comparatively large volumes of sample. While these techniques provide a representative overview of the sample, their averaged signals often probe not only the nanomaterial of interest, but also any support material, debris and impurities in heterogeneous structures. In addition, averaged 25 properties miss statistical outliers, which may be critical for the function of the nanomaterial. For characterisation of interfaces or individual nanostructures, techniques with much higher spatial resolutions are essential.There are few available techniques capable of providing 30 chemical information on the nanometre scale. This review will discuss two such methods: electron energy-loss spectroscopy in the scanning transmission electron microscope (STEM-EELS) and X-ray absorption spectroscopy in the scanning transmission X-ray microscope (STXM-XAS). These spectroscopies study the 35 primary processes of inelastic electron scattering or X-ray absorption to obtain chemical information, from chemical speciation analysis to local bonding environments and electronic structure. While the secondary process of X-ray emission also provides chemical information in the electron and X-ray 40 microscopes (by energy dispersive X-ray spectroscopy and X-ray probe X-ray micro-and nano-analysis respectively), these techniques, whilst being very sensitive to low concentrations, are limited to elemental analysis, and they will not be discussed in this review. Although the probe-specimen interactions of EELS 45 and XAS differ (electron scattering and photon absorption, respectively), they provide remarkably similar chemical information. Due to recent advances in diffractive optics for soft (100 eV to 2 keV 1 ) X-rays, as well as monochromators and aberration correctors for electron microscopes, the spatial and 50 spectral resolutions of STXM-XAS...