Probing the intrinsic conductivity of multiwalled carbon nanotubes

Zamkov, Mikhail; Alnaser, A. S.; Shan, Bing; Chang, Zenghu; Richard, Patrick

doi:10.1063/1.2340537

Cited by 8 publications

(4 citation statements)

References 23 publications

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“…Carbon nanotubes can act as good conductors because of their onedimensional structures, which allow electronic transport to occur ballistically [26,37]. Multiwalled carbon nanotubes have been found to have an intrinsic resistance of 0.2-0.4 kΩs/μm [38,39]. The intrinsic resistance is subjected to modification under strain.…”

Section: Intrinsic Resistance Of Carbon Nanotubesmentioning

confidence: 99%

A Review: Carbon Nanotube-Based Piezoresistive Strain Sensors

2012

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The use of carbon nanotubes for piezoresistive strain sensors has acquired significant attention due to its unique electromechanical properties. In this comprehensive review paper, we discussed some important aspects of carbon nanotubes for strain sensing at both the nanoscale and macroscale. Carbon nanotubes undergo changes in their band structures when subjected to mechanical deformations. This phenomenon makes them applicable for strain sensing applications. This paper signifies the type of carbon nanotubes best suitable for piezoresistive strain sensors. The electrical resistivities of carbon nanotube thin film increase linearly with strain, making it an ideal material for a piezoresistive strain sensor. Carbon nanotube composite films, which are usually fabricated by mixing small amounts of single-walled or multiwalled carbon nanotubes with selected polymers, have shown promising characteristics of piezoresistive strain sensors. Studies also show that carbon nanotubes display a stable and predictable voltage response as a function of temperature.

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Section: Intrinsic Resistance Of Carbon Nanotubesmentioning

confidence: 99%

A Review: Carbon Nanotube-Based Piezoresistive Strain Sensors

2012

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“…Carbon nanotubes (CNTs) have been widely investigated as a promising new material for interconnect vias as they exhibit exceptional electrical, thermal , and mechanical properties. , Studies show that CNTs are stable for current densities up to 10 9 A/cm 2 , which is 2 orders of magnitude higher than copper, and that multiwall CNTs (MWCNTs) can exhibit multichannel ballistic conduction over distances of micrometers . Also, because of their higher chemical stability relative to copper, diffusion-barrier via liners are not needed for CNTs.…”

mentioning

confidence: 99%

“…6,7 Studies show that CNTs are stable for current densities up to 10 9 A/cm 2 , which is 2 orders of magnitude higher than copper, 4 and that multiwall CNTs (MWCNTs) can exhibit multichannel ballistic conduction over distances of micrometers. 8 Also, because of their higher chemical stability relative to copper, diffusion-barrier via liners are not needed for CNTs. Models described by Naeemi et al 9 indicate that MWCNTs longer than 100 µm can have conductivities higher than copper or single-wall CNT (SWCNT) bundles.…”

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confidence: 99%

Low Temperature Synthesis of Vertically Aligned Carbon Nanotubes with Electrical Contact to Metallic Substrates Enabled by Thermal Decomposition of the Carbon Feedstock

et al. 2009

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Growth of vertically aligned carbon nanotube (CNT) carpets on metallic substrates at low temperatures was achieved by controlled thermal treatment of ethylene and hydrogen at a temperature higher than the substrate temperature. High-resolution transmission electron microscopy showed that nanotubes were crystalline for a preheating temperature of 770 degrees C and a substrate temperature of 500 degrees C. Conductive atomic force microscopy measurements indicated electrical contact through the CNT carpet to the metallic substrate with an approximate resistance of 35 kOmega for multiwall carpets taller than two micrometers. An analysis of the activation energies indicated that thermal decomposition of the hydrocarbon/hydrogen gas mixture was the rate-limiting step for low-temperature chemical vapor deposition growth of CNTs. These results represent a significant advance toward the goal of replacing copper interconnects with nanotubes using CMOS-compatible processes.

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“…Carbon nanotubes (CNTs) are a highly promising material for future interconnects due to the remarkable properties they combine such as high thermal conductivity [1,2], ballistic transport over distances in the µm-range [3,4] and the ability to carry high current densities with low electro migration [5]. To make CNT-based interconnects competitive to the currently used copper technology, several challenges have to be overcome, such as formation of low-resistivity contacts, aligned growth both for vertical and horizontal interconnects with high density [6].…”

Section: Introductionmentioning

confidence: 99%

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

Melzer

Waechtler

MüLler

et al. 2013

Microelectronic Engineering

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"Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications", Microelectron. Eng. 107, 223-228 (2013 Carbon nanotubes (CNTs) are a highly promising material for future interconnects. It is expected that a decoration of the CNTs with Cu particles or also the filling of the interspaces between the CNTs with Cu can enhance the performance of CNT-based interconnects. The current work is therefore considered with thermal atomic layer deposition (ALD) of Cu x O from the liquid Cu(I) β-diketonate precursor [( n Bu 3 P) 2 Cu(acac)] and wet oxygen at 135°C. This paper focuses on different thermal in-situ pre-treatments of the CNTs with O 2 , H 2 O and wet O 2 at temperatures up to 300°C prior to the ALD process. Analyses by transmission electron microscopy show that in most cases the Cu x O forms particles on the multi-walled CNTs (MWCNTs). This behavior can be explained by the low affinity of Cu to form carbides. Nevertheless, also the formation of areas with rather layer-like growth was observed in case of an oxidation with wet O 2 at 300°C. This growth mode indicates the partial destruction of the MWCNT surface. However, the damages introduced into the MWCNTs during the pre-treatment are too low to be detected by Raman spectroscopy. Abstract:Carbon nanotubes (CNTs) are a highly promising material for future interconnects due to the remarkable properties they combine such as high thermal conductivity [1,2], ballistic transport over distances in the µm-range [3,4] and the ability to carry high current densities with low electro migration [5]. To make CNT-based interconnects competitive to the currently used copper technology, several challenges have to be overcome, such as formation of low-resistivity contacts, aligned growth both for vertical and horizontal interconnects with high density [6].

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Probing the intrinsic conductivity of multiwalled carbon nanotubes

Cited by 8 publications

References 23 publications

A Review: Carbon Nanotube-Based Piezoresistive Strain Sensors

A Review: Carbon Nanotube-Based Piezoresistive Strain Sensors

Low Temperature Synthesis of Vertically Aligned Carbon Nanotubes with Electrical Contact to Metallic Substrates Enabled by Thermal Decomposition of the Carbon Feedstock

Copper oxide atomic layer deposition on thermally pretreated multi-walled carbon nanotubes for interconnect applications

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