Problems regarding linearity of data of a laser interferometer with a single-frequency laser

Petrů, F.; Čı́p, Ondřej

doi:10.1016/s0141-6359(98)00023-3

Cited by 57 publications

(45 citation statements)

References 10 publications

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“…The standard deviation is better than 0.344 nm. [19,20]. The standard deviation for this record is 0.344 nm (average for the measuring range 650nm).…”

Section: Measured Records and Resultsmentioning

confidence: 89%

“…When the record of length difference from Michelson interferometer and optical resonator was analyzed the method of scale linearity compensation for Michelson interferometer was applied [19,20]. Thanks to compensation of small nonlinearity of this interferometer we obtained better course of the difference between Michelson interferometer and optical resonator.…”

Section: Measured Records and Resultsmentioning

confidence: 99%

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High-resolution detection of small distance changes by an optical frequency comb

et al. 2012

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The work presents a measurement of lengths by an optical measuring resonator. The resonator works as distance-tooptical frequency converter with ultimate linearity. It has locked a tunable laser to certain cavity mode. The optical frequency of the laser is heterodyned with immediate "tooth" of the femtosecond comb spectrum. For the testing of the method the special combination of the optical resonator and Michelson interferometer was put together. This system combines the cavity length of the optical resonator with the measuring arm of the Michelson laser interferometer. The one mirror of the system is common for both laser interferometers and it is driven by piezoelectric transducer. The testing range is limited by the range of tuneability of the used laser and it covers 1000 nm of the length measurement.

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“…The standard deviation is better than 0.344 nm. [19,20]. The standard deviation for this record is 0.344 nm (average for the measuring range 650nm).…”

Section: Measured Records and Resultsmentioning

confidence: 89%

Section: Measured Records and Resultsmentioning

confidence: 99%

High-resolution detection of small distance changes by an optical frequency comb

et al. 2012

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“…After the evaluation of the interference phase, the wavelength resolution of λ/2048 results in a resolution of 260 pm for 532 nm wavelength. The linearization technique implemented here reduces the linearity error to the level of a single discrete LSB (least significant bit)-the resolution of the interferometer [23], [24]. The operating wavelength is λ = 532 nm, and the laser source is a high-stability and lownoise, metrology grade frequency-doubled Nd:YAG laser.…”

Section: Experimental Configurationmentioning

confidence: 99%

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Holá

Hrabina

Šarbort

et al. 2015

Measurement Science Review

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We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.

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“…Namely in case of coordinate multidimensional scanning measurement systems the acquisition speed is crucial. Also processing and evaluation of the interference signal including electronic hardware and software (demodulation and linearization techniques) must be considered during the interferometer design process [40][41][42][43][44][45][46][47]. Each component plays a role in the evaluation of the overall uncertainty of the interferometric systems.…”

Section: Resolution Of the Interferometer And Detectionmentioning

confidence: 99%

Investigation of Short-term Amplitude and Frequency Fluctuations of Lasers for Interferometry

Hrabina¹,

Lazar²,

Holá³

2013

Measurement Science Review

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One of the limiting factors of accuracy and resolution in laser interferometry is represented by noise properties of the laser powering the interferometer. Amplitude and especially frequency fluctuations of the laser source are crucial in precision distance measurement. Sufficiently high long-term frequency stability of the laser source must be achieved especially in applications in fundamental metrology. Furthermore, the short-term frequency variations are also important primarily for measurements done at high acquisition speeds. This contribution presents practical results of measurements of short-term amplitude and frequency noises of a set of laser sources commonly used in laser interferometry. The influence of the interferometer design and electrical parameters of the detection system are also discussed.

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Problems regarding linearity of data of a laser interferometer with a single-frequency laser

Cited by 57 publications

References 10 publications

High-resolution detection of small distance changes by an optical frequency comb

High-resolution detection of small distance changes by an optical frequency comb

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Investigation of Short-term Amplitude and Frequency Fluctuations of Lasers for Interferometry

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