The Y 2 O 3 :Eu films were prepared on sapphire substrates by radio frequency magnetron sputtering. The samples were post-annealed in an air ambient at different temperatures. The Y 2 O 3 :Eu films prior to annealing did not show photoluminescence (PL), however, after annealing, the films became capable of emitting photoluminescent light. The PL spectra were composed of several peaks originating from the transitions between 4𝑓 energy levels of the Eu 3+ ion, from 5 𝐷 0 to 7 𝐹 𝐽 where 𝐽 = 0, 1, 2 ,3, and 4. The PL intensity increased upon annealing at higher temperatures, which was due to the higher degree of crystallinity. The PL intensity decreased above 1200 ○ C resulting from the formation of yttrium aluminate phases, such as YAM (Y 4 Al 2 O 9 ), YAP (YAlO 3 ), and YAG (Y 3 A l5 O 12 ). The unannealed Y 2 O 3 :Eu films exhibited a high optical transmittance in the visible to near-infrared wavelength range. The transmittance of the films decreased as annealing temperature increased due to increase in crystallite sizes.