Process Development of Low Resistive Ag-Based Through Silicon Vias using Inkjet Printing Technique for 3D Microsystem Integration

Yang, Jia-Han; Tsou, Kun-Lin; Fu, Yiming; Cheng, Yi‐Wen; Song, Yen‐Fang

doi:10.1109/memsys.2019.8870649

Cited by 2 publications

(1 citation statement)

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“…Quack et al [241] developed ink-jetted Au-filled TSV arrays. Yang et al [242] deposited Ag and filled a via at a lower processing temperature and electrical resistivity, and further enhanced its electrical performance [243].…”

Section: ) Mems Packagingmentioning

confidence: 99%

Classifications and Applications of Inkjet Printing Technology: A Review

et al. 2021

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Inkjet printing technology uses the low-cost direct deposition manufacturing technique for printing and is applicable in various fields including optics, ceramics, three-dimensional printing in biomedicine, and conductive circuitry. This study reviews the classifications and applications of inkjet printing technologies, with a focus on recent publications. The different design approaches, applications, and research progress of several inkjet printing techniques are reviewed. Among them, the piezoelectric inkjet printing technology is the main focus owing to its reliability and handling of a diverse range of inks. A piezo-driven inkjet printhead is activated by applying a voltage waveform to a piezoelectric membrane. The waveform ensures the formation of the designed droplet and a stable jet. A survey of various drivingvoltage waveforms is conducted, which can serve as a reference to the research community that uses piezodriven inkjet printheads. The challenges of printing quality, stability, and speed and their solutions as published in recent studies are reviewed. Technologies for producing high-viscosity inkjets are explored, and the applications of inkjet printing technology in textile, displays, and wearable devices are discussed.

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Section: ) Mems Packagingmentioning

confidence: 99%