Process optimization of preparing CMOS backplane for ultrahigh pixel density red Micro-LED display
Xue-Yan Wang,
Cheng-Long Guo,
Yi-Jian Zhou
et al.
Abstract:In this paper, an AlGaInP-based red Micro-LED display measured 17.78 mm (0.7 in), with a resolution of 1920 x 1080, a light-emitting mesa size of 6 μm, a pixel pitch of 8 μm and a pixel density of 3175 PPI was designed and fabricated with a CMOS driver backplane. The metal bump preparation technology of the CMOS driver backplane was optimized to enhance the bonding yield and create an optimal display effect. Improper sizing of the etched window in the SiO2 insulation and passivation layer can have a detrimenta… Show more
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