2009
DOI: 10.1016/j.apsusc.2008.11.058
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Processing for optically active erbium in silicon by film co-deposition and ion-beam mixing

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Cited by 8 publications
(5 citation statements)
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“…Owing to inherent uncertainties in analysis based on modeling the reflectivity of dielectric films on substrates, monolithic sol-gel samples are potential alternatives for improving the experimental resolution in the refractive index components. Other low-temperature methods for preparing heavily erbium doped films utilize ion-beam mixing in combination with co-deposition [57] or ion implantation [58]. Accurate measurements of extinction coefficient spectra are of value in determining the effects of erbium doping on absorption edges, optical band gaps, and associated modifications in the glassy framework.…”
Section: Discussionmentioning
confidence: 99%
“…Owing to inherent uncertainties in analysis based on modeling the reflectivity of dielectric films on substrates, monolithic sol-gel samples are potential alternatives for improving the experimental resolution in the refractive index components. Other low-temperature methods for preparing heavily erbium doped films utilize ion-beam mixing in combination with co-deposition [57] or ion implantation [58]. Accurate measurements of extinction coefficient spectra are of value in determining the effects of erbium doping on absorption edges, optical band gaps, and associated modifications in the glassy framework.…”
Section: Discussionmentioning
confidence: 99%
“…The EL spectrum was decomposed using Gaussian curves, as was done in Ref. 9, by fitting the spectrum curve with 10 Gaussian peaks, as shown in Fig. 1(a).…”
Section: Resultsmentioning
confidence: 99%
“…As was explained earlier, the 4f transitions possess some immunity from the host material and the overall symmetry, although the dominant peaks or preferred recombination transitions can vary. As a manifestation to this fact, we would like to bring the attention to the fact that the samples in this work were processed using sol-gel techniques, and that the transitions indicated on page 238 of reference [41] were for Er-doped aluminosilicate, while the ones in the work of Abedrabbo et al in references [42,43] were for ion beam mixing of Er, Si and O and for Er, Si, O and Ge, and all of them shared similar transitions. The ion beam mixing effort of this group started earlier without Er impurity centers as in references [44,45] and was consolidated with rare-earth inclusions.…”
Section: Erbium Emission At the 4f Transition Bandmentioning
confidence: 99%