Processing of metals and semiconductors by a femtosecond laser-based microfabrication system

Meunier, Michel; Fisette, Bruno; Houle, Alexis; Kabashin, Andrei V.; Broude, Sergey; Miller, Pascal

doi:10.1117/12.478595

Cited by 30 publications

(12 citation statements)

References 20 publications

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“…6 Since these effects, which result in poor feature quality of the machined work piece, are created or magnified by the passage of the optical beam through dielectric material, e.g., air, machining is normally conducted in vacuum, which restricts its application in the production environment. 7 Among others, 8 use of inert gases as media for beam delivery has been suggested for these reasons, e.g., helium, because of its high ionization potential, 9,10 but the inconvenience persists.…”

Section: Introductionmentioning

confidence: 99%

Surface profile of material ablated with high-power lasers in ambient air medium

Vatsya¹,

Li²,

Nikumb³

2005

Journal of Applied Physics

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Access and use of this website and the material on it are subject to the Terms and Conditions set forth at Surface profile of material ablated with high-power lasers in ambient air medium Vatsya, S.R.; Li, C.; Nikumb, S.K. NRC Publications Record / Notice d'Archives des publications de CNRC:http://nparc.cisti-icist.nrc-cnrc.gc.ca/npsi/ctrl?lang=en http://nparc.cisti-icist.nrc-cnrc.gc.ca/npsi/ctrl?lang=fr READ THESE TERMS AND CONDITIONS CAREFULLY BEFORE USING THIS WEBSITE.http://nparc.cisti-icist.nrc-cnrc.gc.ca/npsi/jsp/nparc_cp.jsp?lang=en Vous avez des questions? Nous pouvons vous aider. Pour communiquer directement avec un auteur, consultez la première page de la revue dans laquelle son article a été publié afin de trouver ses coordonnées. Si vous n'arrivez pas à les repérer, communiquez avec nous à PublicationsArchive-ArchivesPublications@nrc-cnrc.gc.ca.

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Section: Introductionmentioning

confidence: 99%

Surface profile of material ablated with high-power lasers in ambient air medium

Vatsya¹,

Li²,

Nikumb³

2005

Journal of Applied Physics

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“…Cutting speeds up to 9.2 mm/s have been reported [2], however the line focus used to improve cutting speed removes the ability to cut nonlinear shapes. Net cutting speeds on the order of 8 µm/s [4,5] are more typical, however the thin wafers (i.e., low cutting depths ~50 µm) used in these studies limit applications to solar devices rather than the thicker silicon typically used in heterojunction devices [6].…”

Section: Introductionmentioning

confidence: 99%

Ablation threshold dependence on incident wavelength during ultrashort pulsed laser ablation

Oosterbeek

Ashforth

Bodley

et al. 2017

IJNT

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“…of conical structures, we make a gaussian shaped hole in the surface. These high fluences are often used for fast machining and cutting of silicon because a large amount of material is removed with each pulse [35].…”

Section: Effect Of Fluencementioning

confidence: 99%

Microtextured Silicon Surfaces for Detectors, Sensors & Photovoltaics

Carey¹,

Mazur²

2005

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Executive SummaryWith support from this award we studied a novel silicon microtexturing process and its application in silicon-based infrared photodetectors. By irradiating the surface of a silicon wafer with intense femtosecond laser pulses in the presence of certain gases or liquids, the originally shiny, flat surface is transformed into a dark array of microstructures. The resulting microtextured surface has near-unity absorption from near-ultraviolet to infrared wavelengths well below the band gap. The high, broad absorption of microtextured silicon could enable the production of silicon-based photodiodes for use as inexpensive, room-temperature multi-spectral photodetectors. Such detectors would find use in numerous applications including environmental sensors, solar energy, and infrared imaging.The goals of this study were to learn about microtextured surfaces and then develop and test prototype silicon detectors for the visible and infrared. We were extremely successful in achieving our goals. During the first two years of this award, we learned a great deal about how microtextured surfaces form and what leads to their remarkable optical properties. We used this knowledge to build prototype detectors with high sensitivity in both the visible and in the near-infrared. We obtained room-temperature responsivities as high as 100 A/W at 1064 nm, two orders of magnitude higher than standard silicon photodiodes. For wavelengths below the band gap, we obtained responsivities as high as 50 mA/W at 1330 nm and 35 mA/W at 1550 nm, close to the responsivity of InGaAs photodiodes and five orders of magnitude higher than silicon devices in this wavelength region.The following Project Summary includes: Summary of important resultsPrior to receipt of this contract, we developed a process for microtexturing silicon surfaces with laser-assisted etching [1, 2]. The silicon sample is irradiated with a train of high-power ultrashort (100 fs) laser pulses in the presence of SF 6 or Cl 2 . Where the laser strikes the surface, material is etched away in a pattern of conical spikes, with the spike tips at the level of the unetched surface and the spike bases tens of microns below the surface. The surrounding non-irradiated silicon is unaffected, so areas as small as tens of microns on a side can be made. Figure 1 shows a scanning electron micrograph of a microtextured silicon surface.After etching, the silicon surface appears black to the eye (see Figure 2), and the surface absorbs over 90% of incident light from 0.25 µm to 2.5 µm [3]. Flat crystalline silicon absorbs only about 65% of incident light for wavelengths shorter than 1 µm, and absorbs less than 20% at longer wavelengths, with very low absorptance from 1.1 to 1.4 µm. Creation of a prototype microtextured silicon based p-i-n detector.Much of the work done in Year One and Year Two characterized the effects of laser fluence, shot number, gas pressure, and ambient gas on the absorption properties of microtextured silicon [4][5][6][7]. Using this data, we attempted to make...

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Processing of metals and semiconductors by a femtosecond laser-based microfabrication system

Cited by 30 publications

References 20 publications

Surface profile of material ablated with high-power lasers in ambient air medium

Surface profile of material ablated with high-power lasers in ambient air medium

Ablation threshold dependence on incident wavelength during ultrashort pulsed laser ablation

Microtextured Silicon Surfaces for Detectors, Sensors & Photovoltaics

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