2019
DOI: 10.1109/jeds.2019.2947246
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Processing-Structure-Protrusion Relationship of 3-D Cu TSVs: Control at the Atomic Scale

Abstract: A phase-field-crystal model is used to investigate the processing-structure-protrusion relationship of blind Cu through-silicon vias (TSVs) at the atomic scale. A higher temperature results in a larger TSV protrusion. Deformation via dislocation motion dominates at temperatures lower than around 300 • C, while both diffusional and dislocation creep occur at temperatures greater than around 300 • C. TSVs with smaller sidewall roughness R a and wavelength λ a exhibit larger protrusions. Moreover, different protr… Show more

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Cited by 10 publications
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