“…154 For example, LiZr 2 (PO 4 ) 3 prepared at 1200 C underwent the phase transition from monoclinic to rhombohedral when it was heated, resulting in increased ionic conductivity of up to 1.2 Â 10 À2 S cm À1 measured at 300 C. 18 In general, several reviews considered the recent advances, challenges, and perspectives of NASICON-type electrolytes, and some of their potential in microbattery applications. 16,18,25,38,167,168 One of a few thin-lm batteries with NASICON-type electrolyte was investigated by Hofmann et al Li 1.5 Al 0.5 Ti 1.5 (PO 4 ) 3 electrolyte was deposited by PLD and analysed in the microbattery structure with a Si anode and a LiCoPO 4 cathode. 169 The cathode-electrolyte interface was studied particularly and signicant inter-diffusion processes that are highly dependent on heat treatment were observed.…”