2011
DOI: 10.4028/www.scientific.net/amr.267.109
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Product Information Model of MEMS

Abstract: A lot of information needs to be processed in the MEMS design process, but this information lack the unified expression format at present. This causes the design stage of MEMS not to be able to share information, furthermore causes low design efficiency. A product information model is presented according to MEMS design stage. XML language is used to describe information of each design stage, and an information exchange and sharing platform model has been established to solve MEMS design data sharing and exchan… Show more

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