Production of high-quality manganite-based films on an improved VUP-5M magnetron device

Nikolaenko, Yu. M.; Mukhin, A. B.; Chaika, V. A.; Burkhovetskii, V. V.

doi:10.1134/s1063784210080189

Cited by 16 publications

(8 citation statements)

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“…As it is mentioned above, LSMO films were deposited on the Al 2 O 3 (012) substrates using the method of the magnetron sputtering of the ceramic target of La 0.7 Sr 0.3 MnO 3 composition [4,14]. The substrate temperature was 300 K and 970 K. The obtained films were oxygen deficient directly after deposition.…”

Section: Methodsmentioning

confidence: 99%

Optical conductivity of LSMO films on Al₂O₃ substrates

Tikhii

Gritskih

Kara-Murza

et al. 2013

Phys. Status Solidi C

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We report on the influence of temperature conditions of deposition and annealing given on the optical conductivity spectra of LSMO films. The investigated films were deposited using DC magnetron sputtering of La0.7Sr0.3MnO3 target in argon‐oxygen atmosphere on hot (T = 970 K), and cold (T=300 K) single crystalline substrates of Al2O3 (012). All films were obtained using these technologies are oxygen deficient. Optical transmission was measured in a range 1‐5 eV. The optical conductivity spectra of films with thickness more than 100 nm deposited on hot substrates are slightly dependent on the annealing. These spectra are similar to the corresponding ones of epitaxial films La0.7Sr0.3MnO3 but the typical spectral peaks are slightly shifted to higher energies. The optical conductivity spectra of unannealed films with the thickness less 100 nm which are deposited on the cold and hot substrates do not have the corresponding peak near 1 eV. We explain this fact by means of size effects and oxygen deficit. These factors suppress the mechanism of eg‐eg transition between Mn3+‐Mn4+ ions within parallel spin manifold. The three‐hour annealing in the air on the temperature interval 1070‐1170 K eliminates the oxygen deficiency in films. As a result all optical properties of all investigated films are unified. Besides, the conductivity spectra of the annealed films are similar to the corresponding ones of La0.7Sr0.3MnO3 epitaxial films. But some shift of the low‐energy peak to higher energies can be observed. It may correspond to polycrystallinity of obtained structures. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Section: Methodsmentioning

confidence: 99%

Optical conductivity of LSMO films on Al₂O₃ substrates

Tikhii

Gritskih

Kara-Murza

et al. 2013

Phys. Status Solidi C

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“…The films were obtained by dc magnetron sputtering of a ceramic target onto high-quality single-crystal substrates (Mateck, Germany) with (110) orientation heated to 873 K in a gas mixture atmosphere (20% oxygen and 80% argon) [15]. The films composition was controlled using an INCA Energy-350 energy dispersive spectrometer.…”

Section: Experiments Detailsmentioning

confidence: 99%

Effect of oxygen content "stabilization" in La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- films at post annealing in air

Yu.M.

N.B.

D.O.

et al. 2022

Physics of the Solid State

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The variation of oxygen content in the epitaxial La0.8Sr0.2MnO3-delta films of 12-75 nm thick onto NdGaO3 substrates was quantitatively investigated by indirect method during heat treatment procedure in air at temperature range 873-1073 K. The experimental time dependences of oxygen content variation were investigated theoretically with taking into account the effect of inhomogeneous diffusion of oxygen over the films thickness to provide optimal choice of temperature and duration of the heat treatment procedure. In films 25-75 nm thick, the effect of "stabilization" of the oxygen content (OC = 3) is revealed, which indicates the presence of an energy barrier that prevents the incorporation of an excess oxygen atom into the near-surface layer of the film at optimal conditions of heat treatment. Keywords: epitaxial films, strain, oxygen index, non-uniform oxygen diffusion.

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“…Пленки, полученные описанным выше способом, характеризуются недостатком КС [25]. Последовательное насыщение материала пленок кислородом осуществлялось путем пошаговой термообработки пленочных структур на воздухе при нескольких фиксированных температурах в интервале 773−1173 K. Режим нагревания пленочной структуры до рабочей температуры и охлаждения до комнатной осуществлялся в течение получаса, со скоростью примерно 20−30 K/min.…”

Section: экспериментальные деталиunclassified

Диффузия кислорода в La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- пленках разной толщины на NdGaO-=SUB=-3-=/SUB=--подложках

Николаенко¹,

Efros²,

Artemov³

2021

Журнал Технической Физики

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The results of investigation by the indirect method of step-by-step varying the oxygen content in the series of epitaxial La0.8Sr0.2Mn3- films on single-crystal NdGaO3 substrates are presented. Using numerical simulation we have revealed that the oxygen diffusion coefficient significantly decreases along the film thickness in the direction from the outer surface to the film-substrate interface under conditions of "compressive" mechanical stresses caused by the mismatch of the in-plane crystalline parameters of the film and substrate materials. In films of d≈12—75 nm thickness, the effect is manifested in the fact that the value of the diffusion coefficient in the vicinity of the outer surface of the films also decreases significantly as the thickness of the films decreases. The questions of the applicability of the indirect method for evaluating the oxygen content in thin epitaxial films, as well as other manifestations of effects caused by mechanical stresses are discussed.

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Production of high-quality manganite-based films on an improved VUP-5M magnetron device

Cited by 16 publications

References 1 publication

Optical conductivity of LSMO films on Al₂O₃ substrates

Optical conductivity of LSMO films on Al₂O₃ substrates

Effect of oxygen content "stabilization" in La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- films at post annealing in air

Диффузия кислорода в La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- пленках разной толщины на NdGaO-=SUB=-3-=/SUB=--подложках

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Production of high-quality manganite-based films on an improved VUP-5M magnetron device

Cited by 16 publications

References 1 publication

Optical conductivity of LSMO films on Al2O3 substrates

Optical conductivity of LSMO films on Al2O3 substrates

Effect of oxygen content &quot;stabilization&quot; in La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- films at post annealing in air

Диффузия кислорода в La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- пленках разной толщины на NdGaO-=SUB=-3-=/SUB=--подложках

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Optical conductivity of LSMO films on Al₂O₃ substrates

Optical conductivity of LSMO films on Al₂O₃ substrates

Effect of oxygen content "stabilization" in La-=SUB=-0.8-=/SUB=-Sr-=SUB=-0.2-=/SUB=-MnO-=SUB=-3-delta-=/SUB=- films at post annealing in air