2022
DOI: 10.17714/gumusfenbil.1006430
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Production of high-transparent MgO films by radio-frequency sputtering method

Abstract: Magnesium oxide (MgO) thin films were deposited on silicon and glass substrates by the radio frequency (RF) sputtering method. The MgO films were annealed at 400 ⁰C for 4h. The effect of working pressure on the structure and optical properties of MgO films was investigated. Structural characterization of thin films was determined using the X-ray diffraction (XRD) method. XRD results showed the presence of dominant peaks corresponding to the ( 200) and ( 220) lattice planes of MgO. However, peaks corresponding … Show more

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