Abstract:In this work, highly charged ions have been extracted from the advanced Electron Beam Ion Source (EBIS-A) developed in a scientific cooperation between the Dresden University of Technology and the DREEBIT GmbH Dresden. The charge state distributions of ions extracted from the EBIS-A are measured in the pulse and leaky modes under different operation conditions. Ar 16+ ions with current of 2 pA are produced and extracted in the leaky mode. 3×10 5 Ar 18+ ions per pulse are extracted in the pulse mode. The ion ch… Show more
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